FI-MainGroup/Facet-Choice

  • G03F1/00
  • Originals forphotomechanical production of textured or patterned surfaces, e.g. masks,photo-masks orreticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof [3,2012.01] HB CC 2H195
  • G03F3/00
  • Colour separation; Correction of tonal value (photographic copying apparatus in general G03B) HB CC 2H117
  • G03F5/00
  • Screening processes; Screens therefor HB CC 2H117
  • G03F7/00
  • Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (using photoresist structures for special production processes, see the relevant places, e.g. B44C, H01L, e.g. H01L 21/00, H05K) [3,5] HB CC 2H196
  • G03F9/00
  • Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically (G03F 7/22 takes precedence; preparation of photographic masks G03F 1/00; within photographic printing apparatus for making copies G03B 27/00) [4] HB CC 2H197
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