G03F1/00	Originals forphotomechanical production of textured or patterned surfaces, e.g. masks,photo-masks orreticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof [3,2012.01]
	Note(s) In this main group, the first place priority rule is applied, i.e. at each hierarchical level, in the absence of an indication to the contrary, classification is made in the first appropriate place.[2012.01]