FI-MainGroup/Facet-Choice

  • G01Q10/00
  • Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe [2010.01] HB CC 2G580
  • G01Q20/00
  • Monitoring the movement or position of the probe [2010.01] HB CC 2G580
  • G01Q30/00
  • Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices [2010.01] HB CC 2G580
  • G01Q40/00
  • Calibration, e.g. of probes [2010.01] HB CC 2G580
  • G01Q60/00
  • Particular types of SPM [Scanning-Probe Microscopy] or apparatus therefor; Essential components thereof [2010.01] HB CC 2G580
  • G01Q70/00
  • General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q 60/00 [2010.01] HB CC 2G580
  • G01Q80/00
  • Applications, other than SPM, of scanning-probe techniques (manufacture or treatment of micro-structures B81C; manufacture or treatment of nano-structures B82B 3/00; recording or reproducing information using near-field interaction G11B 9/12, G11B 11/24or G11B 13/08) [2010.01] HB CC 2G580
  • G01Q90/00
  • Scanning-probe techniques or apparatus not otherwise provided for [2010.01] HB CC 2G580
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