F-Term-List

G01B11/00-11/30,102@Z

AA00
CONTENT OF MEASUREMENT

AA01

AA02

AA03

AA04

AA06

AA07

AA09

. Positions; Amount of movement

. . one dimensional

. . two dimensional

. . three dimensional

. . Directions of optical axes; Distances

. . Orthogonal directions to optical axes

. . Amount of movement

AA11

AA12

AA13

AA14

AA15

AA16

AA17

AA18

AA19

AA20

. . Special items (*)

. . . Edge positions

. . . . continuously in the longitudinal direction

. . . Pattern positions

. . . Joints; Overlaps

. . . Mounting positions of components

. . . Centre positions; Centre of gravity of objects

. . . Positions of accidents or failures

. . . Positions of light beam spots

. . . Relative positions

AA21

AA22

AA23

AA24

AA25

AA26

AA27

AA28

AA30

. Length; Diameter; Spacing; Depth

. . in one direction

. . in two directions

. . Height

. . Level differences; Depth

. . Outer diameter

. . Inner diameter

. . Curve length

. Thickness

AA31

AA32

AA33

AA34

AA35

AA36

AA37

AA38

AA39

AA40

. Angles; Attitude

. . Angles formed by two straight lines

. . Angles formed by two planes

. . for finding points or lines of intersection by extension

. . Plane directions Directions of plane-normal lines

. . Taper angles

. . Attitude of objects

. . . Back and front or specific directions

. . Rotation angles

. . . Crank angles

AA42

AA43

AA45

AA46

AA47

AA48

AA49

AA50

. . . Steering angles

. . . Torsion angles

. Shape parameters

. . Curvature; Radius of curvature; Bends

. . Flatness; Planarity; Straightness

. . Circularity; Sphericity

. Irregularity of surfaces

. . Surface roughness

AA51

AA52

AA53

AA54

AA55

AA56

AA58

AA59

AA60

. Contours

. . Cross section

. . three-dimensional

. . . Patterns on surfaces

. . Thickness distribution

. . In-plane patterns

. Area

. Volume; Capacity

. Inner surface conditions

AA61

AA63

AA65

AA67

AA69

. determining types or grades

. Wear; Erosion

. Deformation

. Passing of objects

. Contact with objects to be measured

BB00
OBJECT 1, I.E. FORM; PROPERTY

BB01

BB02

BB03

BB05

BB06

BB07

BB08

. Flat plates of which the longitudinal direction cannot be specified

. . having patterns e.g. printed circuit boards or photomasks

. . discs e.g. magnetic discs or semiconductor wafers

. Stereoscopic objects; Curved surfaces

. . Columns

. . Spheres

. . Tubes; Hollow bodies

BB11

BB12

BB13

BB15

BB16

BB17

BB18

. Long objects

. . linear

. . flat plate shaped

. Moving objects

. Rotating bodies

. having multilayer structures

. Periodic light and darkness openings or grooves

BB21

BB22

BB23

BB24

BB25

BB26

BB27

BB28

BB29

BB30

. Optical properties

. . Transparent bodies

. . Translucent bodies

. . Light shielding bodies

. . Mirror surfaces

. . Rough surfaces

. Objects to be measured having marks

. . characterised by the shape of marks

. . marks emitting light

. . . Fluorescent substances

CC00
OBJECT 2, I.E. INDIVIDUAL EXAMPLE

CC01

CC02

CC03

CC04

CC05

CC06

CC07

CC08

CC09

CC10

. Printed circuit boards

. Films; Sheets

. Magnetic discs; Optical discs

. Screws

. Gears

. Steel sheets

. H-beams; T-beams

. Turbine blades

. Antennas

. Tools

CC11

CC12

CC13

CC14

CC15

CC16

CC17

CC18

CC19

CC20

. Vehicles; Automobiles

. Wheels

. Tyres

. Buildings

. Welded sections

. Human bodies; Animals

. relating to semiconductor manufacturing

. . Photomasks alone

. . Wafers alone

. . Masks and wafers

CC21

CC22

CC23

CC25

CC26

CC27

CC28

. Optical elements

. . Lenses

. . Optical fibres

. relating to electronic components

. . Solders

. . Bonding wires; Leads

. . Mounting conditions

CC31

CC32

CC34

CC35

CC37

CC39

CC40

. Attached films; Vapour deposited films

. Etching

. Trolley wires

. Rails

. Magnetic heads

. Deposits in furnaces

. Road surfaces; Inner surfaces of tunnels

DD00
PURPOSE

DD01

DD02

DD03

DD04

DD05

DD06

DD07

DD08

DD09

DD10

. reducing power consumption

. making size smaller; making weight lighter

. improving resolution

. improving signal-to-noise (SN) ratios; reducing noise

. increasing the intensity of received light

. increasing processing speed

. saving memory

. detecting abnormalities in measuring systems

. increasing or controlling contrast

. . focusing

DD11

DD12

DD13

DD14

DD15

DD16

DD17

DD19

. Measures against external disturbance components

. . Stray light

. . Dust; Dirt; Water droplets

. . Vibration

. . Prevention of external disturbance components e.g. waterproofing

. Prevention of breakage; Protection of measuring instrument

. Thermal insulation

. detecting origins or reference points

EE00
COMPENSATION; CORRECTION

EE01

EE02

EE03

EE04

EE05

EE06

EE07

EE08

EE09

EE10

. Temperature

. . Thermal expansion

. Variations in quantity of light

. . Variations in distribution

. Magnification; Distances to objects to be measured

. . by vibration

. . Height; Thickness

. Image distortion; Aberration

. Sensitivity of light-receiving elements

. . Variations thereof

EE11

EE12

. Scale errors

. Scale bending

FF00
METHOD OF MEASUREMENT

FF01

FF02

FF04

FF05

FF06

FF07

FF08

FF09

FF10

. by imaging

. producing shadows

. Image measurement; Photogrammetry

. . Stereo methods

. . Moire stripes

. . . Grating projection

. . . Grating irradiation i.e. solid gratings

. Trigonometry

. Focus methods

FF11

FF12

FF13

FF15

FF16

FF17

FF18

FF19

. Optical radar methods

. . Optical pulses

. . Phase difference

. using encoders

. . linear

. . rotary

. . incremental

. . absolute

FF21

FF22

FF23

FF24

FF25

FF26

FF27

FF28

FF30

. searching for measuring points

. . by contacting members

. . Projection or collimation of light beams

. . . from two fixed points

. . . from two movable points

. . on monitor images

. . . by cursor lines

. . Automatic tracking

. Inchworm measurement

FF31

FF32

FF33

FF34

FF36

FF38

FF39

FF40

. Time measurement

. . Time interval measurement

. . Known velocity or separate measurement

. . Unknown velocity

. Integration of velocity or angular velocity

. converting linear displacement into rotary displacement

. converting rotary displacement into linear displacement

. converting into amount of spacing

FF41

FF42

FF43

FF44

FF46

FF48

FF49

FF50

. Distribution of reflected or scattered light

. . Forms of distribution

. . Directions

. . . Amount of light in specific directions

. using absorption of light

. using light diffraction

. using polarisation properties

. . Polarisation analysis

FF51

FF52

FF53

FF54

FF55

FF56

FF58

FF59

. using interference

. . Two beam interference

. . . Shearing interference

. . Holography

. . using length measuring interferometers

. . using speckles

. Leakage of light from light guides

. Intrusion of light into light guides

FF61

FF63

FF64

FF65

FF66

FF67

FF68

FF69

FF70

. using standard objects

. Combinations with non-optical means

. . Velocity

. . Angles

. . . Amount of rotation

. . Positions; Amount of movement

. . End detection

. . Temperature

. . for compensation

GG00
LIGHT SOURCE

GG01

GG02

GG03

GG04

GG05

GG06

GG07

GG08

GG09

GG10

. Kinds of light sources

. . Heat radiation e.g. incandescent lamps

. . Gas discharge e.g. fluorescence lamps

. . Lasers

. . . Gas lasers

. . . Semiconductor lasers

. . Light-emitting diodes i.e. LED

. . Instantaneous light sources e.g. strobes

. . Objects to be measured per se

. . Natural light

GG11

GG12

GG13

GG14

GG15

GG16

GG17

GG18

. Forms of light sources

. . Point light sources

. . Arrangements of points

. . . in rows

. . . planar

. . Linear light sources

. . Circular light sources

. . Planar light sources

GG21

GG22

GG23

GG24

GG25

. Wavelengths

. . Monochrome

. . Multiple wavelengths

. . White colour or continuous wavelengths

. . wavelength-variable

HH00
INCIDENT LIGHT

HH01

HH02

HH03

HH04

HH05

HH06

HH07

HH08

HH09

HH10

. Distribution of intensity

. . Dispersed light

. . Parallel light

. . Spot light; Beam light

. . Slit light; Band-like light

. . Grid light; Multiple slit light

. . Encoded pattern light

. Polarised light

. . Linearly polarised light

. . Circularly or elliptically polarised light

HH11

HH12

HH13

HH14

HH15

HH16

HH17

HH18

. Incidence directions

. . oblique

. . Normal line directions

. . Multiple directions

. . Transmitting types

. . Dark field

. . Bright field

. . Variable incidence direction

JJ00
LIGHT-RECEIVING SECTION

JJ01

JJ02

JJ03

JJ05

JJ07

JJ08

JJ09

. Point detection

. Line detection

. Plane detection

. Multiple light-receiving sections

. Arrangements; Directions

. . oblique with respect to objects to be measured

. . perpendicular with respect to objects to be measured

JJ11

JJ12

JJ13

JJ14

JJ15

JJ16

JJ17

JJ18

JJ19

. Number of elements at one light-receiving section

. . zero

. . . Photographs; Films

. . . Diffusing plates; Screens

. . one

. . . PSDs

. . . Photomultipliers

. . . Photodiodes

. . . Image pick-up tubes

JJ22

JJ23

JJ24

JJ25

JJ26

. . several

. . . two

. . multiple

. . . one-dimensional

. . . two-dimensional

KK00
OBSERVATION METHOD

KK01

KK02

KK03

. continuous

. intermittent

. instantaneous

LL00
OPTICAL SYSTEM

LL01

LL02

LL03

LL04

LL05

LL06

LL07

LL08

LL09

LL10

. Light guides

. . Optical fibres

. . . Multiple fibres

. Lenses; Lens systems

. . Variable magnification lenses

. . . Zoom lenses

. . Multi-focus lenses

. . Cylindrical lenses

. . Beam expanders

. . Other special lenses (*)

LL11

LL12

LL13

LL14

LL15

LL16

LL17

LL18

LL19

LL20

. Full reflectors

. . Plane mirrors including prisms

. . . Rotation or vibration

. . Polygon mirrors

. . . Rotation

. . Reflex reflectors

. . . Corner cubes

. . . Aggregates of a plurality of reflectors

. . Spherical mirrors; Parabolic mirrors

. Wavelength selecting mirrors i.e. dichroic mirrors

LL21

LL22

LL23

LL24

LL25

LL26

LL28

LL29

LL30

. Optical filters

. . Wavelength selecting filters e.g. interference filters

. . . variable in wavelengths

. . Filters for controlling light amount

. . . Variable density plates

. . Cut-off filters

. Slits

. . Rotating slits

. Diaphragms; Shutters; Choppers; Sectors

LL31

LL32

LL33

LL34

LL35

LL36

LL37

. Polarisation-related elements

. . Polariscopes

. . . as polarisers

. . . as analysers

. . Phase plates

. . . Lambda quarter wavelength plates

. . Polarising beam splitters i.e. PBS

LL41

LL42

LL43

LL44

LL46

LL47

LL49

LL50

. Gratings

. . Diffraction gratings

. . . FZPs

. . . . LFZPs

. Prisms excepting those covered by LL12

. . Special prisms(*)

. Diffusing plates

. Indexes

LL51

LL53

LL55

LL57

LL59

. Holograms as optical elements

. relating to electro-optical effects

. relating to magneto-optical effects

. relating to acousto-optical effects

. Telecentric optical systems

LL61

LL62

LL63

LL64

LL65

LL67

LL68

. Scanning optical systems

. . Mirrors

. . Slits

. . Optical fibres

. . Others

. Spectrometers

. . Monochromators

MM00
SCANNING FORM

MM01

MM02

MM03

MM04

MM06

MM07

MM08

MM09

. by relative movement

. . Movement of objects

. . . Linear movement

. . . Rotation

. . Movement of entire measuring instrument

. . . Linear movement

. . . Rotation

. . . Revolution

MM11

MM12

MM13

MM14

MM15

MM16

. Scanning by light projection systems

. . A plurality of light sources

. . moving projectors

. . . Linear movement

. . . Rotation

. . Optical scanning

MM21

MM22

MM23

MM24

MM25

MM26

MM28

. Scanning by light-receiving systems

. . Self-scanning types

. . Movement of light-receiving instruments

. . . Linear movement

. . . Rotation

. . Optical scanning

. . Synchronisation with projection systems

NN00
CONTROL

NN01

NN02

NN03

NN05

NN06

NN08

. of light intensity

. . Light source outputs

. . by diaphragms or filters

. of light phases

. of light wavelengths

. Light modulation

NN11

NN12

NN13

NN15

NN16

NN17

NN18

NN19

NN20

. of light-receiving sections

. . Accumulation time

. . Degree of amplification

. Received light quantity monitors

. . Dedicated light receiving devices

. . using measuring light receiving devices

. . . Peak values

. . . Mean values

. of other than measuring instruments

PP00
STRUCTURE OF ENTIRE DEVICE

PP01

PP02

PP03

PP04

PP05

. relating to the supporting or holding detectors

. . One-dimensional drive

. . Two-dimensional drive

. . Three-dimensional drive

. . Swinging

PP11

PP12

PP13

PP15

PP16

PP17

PP18

. Means for holding or mounting objects

. . Moving tables

. . . rotation only

. . Belt conveyers

. . Roller rows

. . Free falling

. . Fixation to rotating shafts

PP21

PP22

PP23

PP24

PP25

PP26

. Forms of measuring instruments

. . Light projection and reception integrated types

. . Projectors

. . Microscopes

. . Robots

. . Measuring pigs

QQ00
SIGNAL PROCESSING

QQ01

QQ02

QQ03

QQ04

QQ05

QQ06

QQ07

QQ08

QQ09

. Sampling

. Peak hold

. Analog-digital conversion; Conversion into multiple value

. . Binarisation

. . . Fixed binarisation

. . . . plural in thresholds

. . . Differential or difference binarisation

. . . Determination or change of thresholds

. . . Binarisation for every element

QQ11

QQ12

QQ13

QQ14

QQ15

QQ16

QQ17

QQ18

. Signal delay

. . using shift registers

. Differentials or differences of signals

. Integrals of signals

. . Moving averages

. Fourier transform; Reverse Fourier transform

. Approximate expressions e.g. polynomial approximation

. . Least square methods

QQ21

QQ23

QQ24

QQ25

QQ26

QQ27

QQ28

QQ29

QQ30

. Extraction of parameters for specifying shapes

. Storage of signals

. . of images

. Comparison of signals; Subtraction of signals

. . Ratios

. Addition of signals

. Detection of specified positions of signals

. . Positions where maximum or minimum values are taken

. . Zero cross points; Points coincident with reference values

QQ31

QQ32

QQ33

QQ34

QQ35

QQ36

QQ37

QQ38

QQ39

QQ40

. Image processing including one-dimensional processing

. . Correction of signals; Emphasis of contours

. . . Filtering

. . . Elimination of noise

. . Generation of cursor lines

. . Generation of windows

. . Masking

. . Matching of patterns

. . . with standard patterns

. . Generation of graduation lines

QQ41

QQ42

QQ43

QQ44

QQ45

QQ47

. Statistical processing

. . Averaging or normalisation

. . Creation of histograms

. . Frequency analysis

. . Projection on one axis

. using gate means

QQ51

QQ52

QQ53

QQ54

. Counters

. . characterised by count starting points

. . characterised by count terminating points

. . Holding or latching count values

RR00
CREATION OR SETTING OF COMPARATIVE REFERENCE DATA

RR01

RR02

RR03

RR04

RR05

RR06

RR07

RR08

RR09

RR10

. Interiors of work pieces

. Comparison by local patterns

. Objects to be compared with

. . Patterns for erasing defects

. . Shape characteristic values

. . Reference data other than shapes

. . Actual objects

. . Data for normal articles

. . . storing after measurement

. Others

SS00
INDICATION; RECORDING

SS01

SS02

SS03

SS04

SS06

SS07

SS09

. Contents of indication or recording

. . Images of objects to be measured

. . Characters e.g. letters or numerals

. . Grades; being acceptable or unacceptable

. Printing

. . onto objects to be measured

. Alarms

SS11

SS12

SS13

SS14

SS15

. Indication or recording means

. . optical

. . . Screen display

. . . Screens

. . Sounds or voices

TT00
OPERATION

TT01

TT02

TT03

TT04

TT06

TT07

TT08

. Alignment or carry-in of articles

. Positioning

. Sorting

. Cleaning

. Processing or machining of objects to be measured

. . before measurement

. . after measurement

UU00
ESPECIALLY IMPORTANT POINT

UU01

UU02

UU03

UU04

UU05

UU06

UU07

UU08

UU09

. Projection systems

. Light-receiving systems

. Holding or supporting of measuring instruments

. Holding or supporting of objects to be measured

. Signal processing

. Scanning

. Optical systems

. . Gratings

. . Indexes

2F065	LENGTH MEASURING DEVICES BY OPTICAL MEANS
	G01B11/00 -11/30,102@Z