FI (list display)

  • B81B7/00
  • Micro-structural systems [7] HB CC 3C081
  • B81B7/02
  • .containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS] (B81B 7/04 takes precedence) [2006.01] HB CC 3C081
  • B81B7/04
  • .Networks or arrays of similar micro-structural devices [7] HB CC 3C081
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