F-Term-List

G03F7/004-7/04;7/06,501;7/075-7/115;7/16-7/18

AA00
POLYFUNCTIONAL DIAZO PHOTOSENSITIVE COMPOUND OR POLYFUNCTIONAL AZIDE PHOTOSENSITIVE COMPOUND (AF01-AF09 TAKE PRECEDENCE)

AA01

AA04

AA06

. Polyfunctional diazonium compounds (such as diazo resins)

. Polyfunctional p-quinonediazide compounds

. Polyfunctional azide compounds (such as bisazide)

AB00
INORGANIC PHOTOSENSITIVE COMPOUND

AB01

AB03

AB05

AB07

AB10

. Dichromates

. Inorganic resists

. Chalcogenides

. Photocatalysts (such as titanium oxides)

. Silver salts (AB05 takes precedence)

AC00
COMPOUND CONTAINING RADICAL POLYMERISABLE CARBON-TO-CARBON UNSATURATED GROUP

AC01

AC02

AC03

AC05

AC06

AC08

AC09

AC10

. Allyl groups

. . Macromolecules

. . . Polymers or copolymers of allyl acrylates or polymers or copolymers of allyl methacrylates

. Acrylamide groups, methacrylamide groups, acrylimide groups, or methacrylimide groups

. . Macromolecules

. Vinyl ether groups or vinyl ester groups

. . Polyvalent

. . . Macromolecules

AC11

AC12

AC13

AC15

AC17

AC19

. Vinylphenyl groups

. . Macromolecules

. . Divinylbenzenes

. Dienes

. Acetylenic unsaturated groups

. Maleic acid constitutions or maleimide groups

AC21

AC22

AC23

AC24

AC25

. Monoacryloyloxy groups or monomethacryloyloxy groups

. . Acrylic acids, methacrylic acids or their salts or anhydrides

. . Trialkoxysilylalkyl acrylate or trialkoxysilylalkyl methacrylate

. . Poly(oxyalkylenes)

. . Macromolecules (AC24 takes precedence)

AC31

AC32

AC33

AC34

AC35

AC36

AC37

AC38

. Polyvalent acryloyloxy groups or polyvalent methacryloyloxy groups

. . Linear alkylenediols (AC53 or AC54 takes precedence)

. . Trimethylolpropanes (AC53 or AC54 takes precedence)

. . Bisphenols (AC53 or AC54 takes precedence)

. . Pentaerythritols (AC53 or AC54 takes precedence)

. . Dipentaerythritols (AC53 or AC54 takes precedence)

. . Acrylates or methacrylates of urethane types (AC38, AC53, AC54 or AC57 takes precedence)

. . Isocyanurates (AC53 or AC54 takes precedence)

AC42

AC43

AC44

AC45

AC46

AC47

AC48

AC49

AC50

. . Addition polymers

. . . Acrylic compound units or methacrylic compound units

. . . . Acrylic acids, methacrylic acids or their salts, halides, anhydrides, or alkyl ester units or cycloalkylester units

. . . . Units having acryloyloxy groups or methacryloyloxy groups in the side chain

. . . . . Units having acryloyloxy groups or methacryloyloxy groups introduced by epoxy groups

. . . . . Units having acryloyloxy groups or methacryloyloxy groups introduced by isocyanate groups

. . . Maleic acids or their salts, halides, anhydrides, ester units, or maleimide units

. . . Styrene compound units

. . . Vinyl alcohol units or vinyl acetate units

AC52

AC53

AC54

AC55

AC57

AC58

AC59

AC60

. . Polycondensates or polyaddition products which is not covered by AC53-AC70

. . Acrylic-modified epoxy constitutions or methacrylic-modified epoxy constitutions, excluding addition polymers

. . . Further modified by acids

. . Phenolic resins or novolak resins (AC53 or AC54 takes precedence)

. . Polyurethanes

. . Polyesters or caprolactone modified constitutions (AC57 takes precedence)

. . Macromolecules containing silicon in the main chain

. . . Polysiloxanes or ladder polysiloxanes (AC67 or AC69 takes precedence)

AC62

AC63

AC64

AC65

AC66

AC67

AC68

AC69

AC70

. . Polyethers (AC53, AC54, AC57, AC63 or AC64 takes precedence)

. . Poly(oxyalkylenes) or oxyalkylene modified constitutions

. . . Poly(oxyalkylene) diacrylates or poly(oxyalkylene) dimethacrylates

. . Polyamides

. . . Polyimide precursors

. . . . Containing siloxane chains in the main chain

. . . Polybenzoxazole precursors

. . . . Containing siloxane chains in the main chain

. . Polyimides or polybenzoxazoles

AC71

AC72

AC73

AC74

AC75

AC76

AC77

AC78

AC79

AC80

. Acidic groups

. . Carboxy groups (AC22, AC44, AC48, AC54, AC66 or AC67 takes precedence)

. . Phenolic hydroxyl groups (AC55, AC68 or AC69 takes precedence)

. Alcoholic hydroxyl groups (AC35, AC36, AC46, AC50, AC53 or AC54 takes precedence)

. Amino groups or imino groups

. Quaternary ammonium groups or quaternary iminium groups

. Functional groups having polymerisation initiator functions

. Containing silicon atoms (AC23, AC59, AC60, AC67 or AC69 takes precedence)

. Containing fluorine atoms

. Containing phosphorus atoms

AD00
COMPOUND GENERATING RADICAL

AD01

AD02

AD03

AD04

AD05

AD06

AD07

AD09

AD10

. Norrish type I decompositions

. . Acetophenone compounds (AD06 takes precedence)

. . . Benzoin compounds or benzoin alkyl ether compounds

. . . Benzyl compounds

. . . Benzyl ketal compounds

. . Oxime ester compounds

. . Acylphosphine compounds

. Trihalomethyl compounds

. . Triazine compounds

AD11

AD12

AD13

AD14

AD15

AD16

AD18

AD19

AD20

. Types of hydrogen abstraction by carbonyls (such as acridones)

. . Benzophenone compounds

. . . Bis(dimethylamino)benzophenones

. . . Bis(diethylamino)benzophenones

. . Xanthone compounds or thioxanthone compounds

. . Benzoquinone compounds or anthraquinone compounds

. Onium salts

. . Sulfonium compounds

. . Iodonium compounds

AD21

AD24

AD26

AD28

AD30

. Decompositions of sulfur-to-sulfur bonds (such as disulfides)

. Biimidazoles

. Peracids or peroxides

. Borates

. Acridines

AD31

AD32

AD33

AD34

AD35

AD38

. Metal redox compounds

. . Metallocene compounds

. . . Ferrocene compounds

. . . Titanocene compounds

. . Silver halides

. Azos

AE00
COMPOUND HAVING A PLURALITY OF CROSSLINKABLE GROUPS, WHICH IS NOT COVERED BY ANY PLACE UNDER VIEWPOINTS AA-AC

AE01

AE02

AE03

AE04

AE05

AE06

AE07

AE08

AE09

AE10

. Low-molecular-weight compounds having a plurality of crosslinkable groups

. . Methylol groups or alkoxymethyl groups

. . . Melamine compounds

. . . Urea compounds

. . . Compounds having phenolic hydroxyl groups

. . Epoxy groups or glycidyl groups

. . Oxetanyl groups

. . Isocyanate groups or blocked isocyanate groups

. . Silicon hydride (SiH) groups

. . Vinyl ether groups or vinyl ester groups

AE11

AE12

AE13

AE14

AE15

AE17

AE18

AE19

AE20

. Macromolecules having a plurality of crosslinkable groups

. . Epoxy groups or glycidyl groups

. . . Polyacrylates or polymethacrylates (*22)

. . . Novolak type epoxy resins

. . . Bisphenol type epoxy resins (*23)

. . Oxetanyl groups

. . . Polyacrylates or polymethacrylates (*24)

. . . Novolak types

. . . Bisphenol types

AE22

AE23

AE24

AE26

AE29

AE30

. . Methylol groups or alkoxymethyl groups

. . Vinyl ether groups or vinyl ester groups

. . Isocyanate groups or blocked isocyanate groups

. . Halogenated methyl groups or halogenated phenyl groups

. . Having silicon hydride (SiH) groups

. . . Polysiloxanes or ladder polysiloxanes

AE32

AE33

AE34

AE35

AE36

AE40

. . Dimerisation types

. . . Cinnamoyl compounds or cinnamic acids

. . . Benzalacetophenones or chalcones

. . . Stilbenes

. . . Styrylpyridiniums or stilbazoliums

. Having unspecific constitutions

AF00
COMPOUND FORMING OR RELEASING ACID

AF01

AF02

AF03

AF04

AF05

AF07

AF08

AF09

. Compounds having o-quinonediazide groups

. . Low-molecular-weight compounds having naphthoquinonediazide (NQD) groups

. . . Having two aromatic rings other than NQD groups

. . . Having three aromatic rings other than NQD groups

. . . Having four or more aromatic rings other than NQD groups

. . Macromolecules having NQD groups

. . . Novolak resins

. . . . Pyrogallol acetone resins

AF11

AF12

AF13

AF14

AF15

AF16

AF18

AF19

. Inner onium salts (AA01 takes precedence)

. Constitutions of cation parts of onium salts (AA01 or AF90 takes precedence)

. . Iodonium compounds

. . . Macromolecular iodonium compounds

. . . Diphenyliodoniums

. . . Substituted diphenyliodoniums (AF14 takes precedence)

. . Ammonium compounds or iminium compounds

. . . Tetraalkylammoniums

AF21

AF22

AF23

AF24

AF25

AF26

AF27

AF28

AF29

. . Sulfonium compounds

. . . Having aromatic rings

. . . . Triarylsulfoniums (hereinafter, AF38 or AF39 takes precedence)

. . . . . Unsubstituted triphenylsulfoniums

. . . . . Triphenylsulfoniums in which only linear alkyls are substituted

. . . . . Triphenylsulfoniums in which only cycloalkyls are substituted

. . . . . Triphenylsulfoniums in which only linear alkoxys are substituted

. . . . . Triphenylsulfoniums in which only halogens are substituted

. . . . . Forming S+ containing rings by coupling aromatic rings

AF32

AF33

AF35

AF36

AF38

AF39

. . . . Phenacyl constitutions

. . . . Aromatic condensed ring constitutions (AF29 takes precedence)

. . . Tetrahydrothiophenium constitutions

. . . Aliphatic ring constitutions (AF26 takes precedence) (*29)

. . . Polyvalent sulfonium compounds

. . . . Macromolecular sulfonium compounds

AF41

AF42

AF43

AF44

AF45

AF48

. Anion parts of onium salts

. . Sulfonate anions (RSO3-), wherein R is linearly low-molecular-weight molecules

. . . R being trifluoromethyl groups (CF3)

. . . R being fluoroalkyl groups (CnF2n+1), wherein n is 2 or more and 4 or less

. . . R being fluoroalkyl groups (CnF2n+1), wherein n is 5 or more

. . Sulfonate anions (RSO3-), wherein R is macromolecules

AF51

AF52

AF53

AF54

AF56

AF57

. . RSO3-, wherein R is low-molecular-weight molecules having ring constitutions

. . . Aliphatic rings (AF63 takes precedence)

. . . . Adamantyl constitutions

. . . Non-aromatic heterocyclic rings

. . . Aromatic carbon rings, not directly binding SO3-

. . . Aromatic heterocyclic rings

AF62

AF63

AF64

AF66

AF67

AF68

AF69

AF70

. . . Having no constitution of "CFSO3-, wherein F is fluorine or fluorinated alkyl groups

. . . . Camphorsulfonates

. . . . Aromatic carbon rings directly binding SO3-

. . . Having no constitution of "CFSO3-, wherein F is fluorine or fluorinated alkyl groups

. . . . Having "SO3-, COO, ring" in this order, excluding carbonates and urethanes

. . . . Having "SO3-, OCO, ring" in this order, excluding carbonates and urethanes

. . . . Containing ethers or carbonyls between rings and SO3-, excluding amides esters, urethanes and ureas

. . . . Containing S atoms or N atoms between rings and SO3-

AF71

AF72

AF73

AF75

AF76

AF78

AF79

. . Carboxylate anions (RCOO-)

. . . R being macromolecules

. . . R having fluorine atoms

. . Imidates, methides, or amidates

. . . Macromolecules

. . Coordination type anions

. . Borate compounds

AF81

AF82

AF83

AF84

AF85

AF87

AF88

AF89

AF90

. Sulfone compounds or sulfonic acid compounds

. . Oxime sulfonate compounds

. . Sulfonyl oxyimide compounds

. . Disulfone compounds

. . Sulfonyl diazomethane compounds

. Triazine compounds or trihalomethyl compounds

. Organo-metallic compounds

. Aromatic nitro compounds

. Diazonium salts (AA01 takes precedence)

AF91

AF92

AF93

AF94

AF96

AF98

AF99

. Acid dissociation, wherein macromolecules are in the same units as acid generating groups

. . Acetals or ketals

. Acid reactive groups other than acid dissociative groups, or isocyanate groups, wherein macromolecules are in the same units as acid generating groups

. Amino groups or imino groups, including acid dissociative protected group, wherein macromolecules are in the same units as acid generating groups

. Macromolecules (AF07-AF09, AF14, AF39, AF48, AF72 or AF76 takes precedence)

. Having unspecific constitutions

. Combining two or more kinds

AG00
COMPOUND FORMING OR RELEASING BASE

AH00
MACROMOLECULE HAVING ACID DISSOCIATIVE GROUP IN THE SIDE CHAIN (1)

AH01

AH02

AH03

AH04

AH05

AH08

AH09

AH10

. Acid dissociative groups generating acidic groups

. . Acetals or ketals

. . . Alkoxyalkyl, including cyclic constitutions

. . . . Ethoxyethyl

. . . . Tetrahydropyranyl

. . Esters or ethers (AH02-AH05 take precedence)

. . . Silylesters or silylethers

. . . . Trimethylsilyl

AH11

AH12

AH13

AH14

AH15

AH16

AH17

AH18

AH19

AH20

. . . Tertiary carbon existing on chains

. . . . Tertiary-butyl (t-butyl)

. . . . Tertiary-butoxycarbonyl (t-BOC)

. . . . Having cyclic constitutions

. . . . . Adamantyl groups being cyclic constitutions

. . . Tertiary carbon forming cyclic constitutions

. . . . 2-Linear alkyl-2-adamantyl

. . . . 2-Linear alkyl-2-norbornyl

. . . . 1-Linear alkylcyclopentyls or 1-linear alkylcyclohexyls

. . . . Having lactone rings in acid dissociative groups

AH21

AH22

AH23

AH24

AH25

AH26

AH27

AH29

AH30

. Acid dissociative groups generating neutral or basic functional groups

. . Acetals or ketals

. . . "O-C-O" forming the same rings (such as glycoacetonides)

. . . Alkoxyalkyl, including cyclic constitutions

. . . . Tetrahydropyranyl or tetrahydrofuranyl

. . Ethers (AH22-AH25 take precedence)

. . Ester carbonates or urethanes (such as t-BOC)

. Crosslinked acid dissociative group*

. Opening rings by acids* (AH23 takes precedence)

AH31

AH32

AH33

AH34

AH35

AH36

AH38

AH39

AH40

. Atoms other than carbon, oxygen, hydrogen and silicon (AF14 takes precedence)

. . Nitrogen (AF76, AH35, AJ75, AK08 or AK09 takes precedence)

. . . Cyano groups

. . Sulfur, excluding sulfur in acid generating constitutions

. . . Sulfonamide groups

. . . Cyclic constitutions containing SO or SO2 (such as sultones)

. . Fluorine (AF48, AF72, AF76 or AF96 takes precedence)

. . . Having hexafluorohydroxypropyl groups, including hexafluorohydroxypropyl groups protected with acid dissociative groups

. . . "Main chain-A-ester-R" (AH39 takes precedence)

AH41

AH45

AH47

AH49

AH50

. Cyclic carbonate constitutions or cyclic anhydride constitutions (AJ74 takes precedence)

. Having acid dissociative bonds in the main chains and side chains

. Polycondensates or polyaddition products having end modifications

. Combining two or more kinds of macromolecules covered by viewpoint AJ or AK (AH50 takes precedence)

. Liquid-repellency imparting agents, or agents for imparting uneven distribution

AJ00
MACROMOLECULE HAVING ACID DISSOCIATIVE GROUP IN THE SIDE CHAIN (2): ADDITION POLYMER

AJ01

AJ02

AJ03

AJ04

AJ05

AJ07

AJ08

AJ09

. Units having acid dissociative groups

. . Styrenic units

. . . Hydroxystyrene compounds

. . . . 4-Hydroxystyrenes

. . . . 4-Isopropenylphenols

. . . Styrene compounds having carboxy groups

. . . . 4-Vinylbenzoic acids

. . . . 4-Vinylphenoxyacetic acids

AJ12

AJ13

AJ16

AJ18

. . Acrylic units or methacrylic units

. . . Acrylic acids or methacrylic acids

. . . Alpha-substituted acrylic acids other than those substituted by methyl groups

. . . Acrylates or methacrylates having acid dissociative groups on aliphatic rings

AJ22

AJ23

AJ24

AJ25

AJ26

AJ29

. . Units having double bonds on rings

. . . Bicyclo compounds

. . . . Norbornene carboxylic acid compounds

. . . . . Norbornene carboxylic acids

. . . Tricyclo compounds or tetracyclo compounds

. . . Having monocyclic rings and rings containing hetero atoms

AJ32

AJ33

AJ35

AJ37

AJ38

. . Other units having carbon-to-carbon double bonds

. . . Maleic acids or monomaleates

. . . Vinyl esters or vinyl ethers

. . . Having allyl (CH2=CH-CH2-) groups which may be fluorinated

. . . . Intramolecularly cyclising

AJ41

AJ42

AJ43

AJ44

AJ45

AJ47

AJ48

AJ49

. Units without acid dissociative groups

. . Styrenic units

. . . Styrene compounds without hydroxyl groups on aromatic rings

. . . . Styrenes

. . . . Having alkoxy (-OR) groups on aromatic rings (also including -OCOR group)

. . . Hydroxystyrene compounds

. . . . 4-Hydroxystyrenes

. . . . 4-Isopropenylphenols

AJ51

AJ52

AJ53

AJ54

AJ55

AJ56

AJ57

AJ58

AJ59

AJ60

. . Acrylic units or methacrylic units

. . . Acrylic acids or methacrylic acids

. . . Acrylates or methacrylates

. . . . Having lactone rings

. . . . . "Main chain-COO-linking group-lactone ring"

. . . . Consisting only of carbon and hydrogen, and having aliphatic rings

. . . . . 1-Adamantyl

. . . . Having aliphatic rings other than those covered by AJ56 (AJ54 or AJ55 takes precedence)

. . . . . 3-Hydroxy-1-adamantyl

. . . . Having aromatic carbon rings

AJ62

AJ63

AJ64

AJ65

AJ66

AJ67

AJ68

AJ69

AJ70

. . . Alpha-substituted acrylic acids other than those substituted by methyl groups

. . . Alpha-substituted acrylates other than those substituted by methyl groups

. . . . Having lactone rings

. . . . . "Main chain-COO-linking group-lactone ring"

. . . . Consisting only of carbon and hydrogen, and having aliphatic rings

. . . . . 1-Adamantyl

. . . . Having other aliphatic rings than those covered by AJ66 (AJ64 or AJ65 takes precedence)

. . . . . 3-Hydroxy-1-adamantyl

. . . . Having aromatic carbon rings

AJ72

AJ73

AJ74

AJ75

AJ77

AJ78

AJ79

. . Units having double bonds on rings

. . . Rings containing hetero atoms

. . . . Maleic anhydrides

. . . . Maleimide compounds

. . . Bicyclo compounds whose rings consist only of carbon

. . . . Norbornenes

. . . Tricyclo or tetracyclo compounds whose rings consist only of carbon

AJ82

AJ83

AJ85

AJ87

AJ88

. . Other units having carbon-to-carbon double bonds

. . . Ethylene which may be fluorinated

. . . Vinyl esters or vinyl ethers

. . . having allyl (CH2=CH-CH2-) groups which may be fluorinated

. . . . Intramolecularly cyclising

AK00
MACROMOLECULE HAVING ACID DISSOCIATIVE GROUP IN THE SIDE CHAIN (3)

AK01

AK02

AK03

AK05

AK06

AK08

AK09

. Polycondensates or polyaddition products

. . Macromolecules containing silicon in the main chain (AK09 takes precedence)

. . . Derived from trifunctional silanes (RSiX3)

. . Novolak resins

. . . Consisting only of m-cresols or p-cresols and formaldehydes

. . Polyamides, polyimides or their precursors

. . . Containing siloxane chains in the main chain

AK11

. Metathesis polymers (such as ring-opening polymerisation products of norbornene)

AL00
COMPOUNDS DISSOCIATED BY ACID, WHICH IS NOT COVERED BY ANY PLACE UNDER VIEWPOINTS AF-AK

AL01

AL02

AL03

AL05

AL07

. Acid dissociative constitutions

. . Acetals or ketals

. . Esters, urethanes, or ethers with acid hydroxyl groups (AL02 takes precedence)

. Macromolecules having acid dissociative bonds only in the main chain

. Dendrimers

AL11

AL12

AL13

AL16

AL17

AL19

. Acid dissociative compounds other than those covered by AL05-AL07

. . Phenol compounds

. . . Polyhydroxybenzophenone compounds

. . . Having constitutions of "phenols-CR2-phenols"

. . . . Aromatic rings being linked in branched form (AL19 takes precedence)

. . . . Aromatic rings being linked annularly

AL22

AL23

AL25

AL27

. . Aliphatic ring containing compounds

. . . Having steroid skeletons

. . Cage-type silsesquioxane compounds

. . Having nitrogen atoms

AM00
MACROMOLECULE WHICH IS NOT COVERED BY ANY PLACE UNDER VIEWPOINTS AA-AL

AM01

AM02

AM03

AM04

AM08

AM09

AM10

. Natural macromolecules or modified natural macromolecules

. . Proteins or modified proteins

. . . Gelatines or modified gelatines

. . Celluloses or modified celluloses

. In the form of particles

. Having unspecific constitutions

. Simultaneously using two or more kinds

AM11

AM12

AM13

AM14

AM15

AM16

AM18

. Addition polymers

. . Styrene compound units

. . . Styrenes

. . . Alpha-methylstyrenes

. . . Hydroxystyrene compounds

. . . . Poly(4-hydroxystyrenes) *

. . Maleic acids or their salts, halides, anhydrides, or ester units

AM22

AM23

AM24

AM25

AM26

AM27

AM29

AM30

. . Acrylate units or methacrylate units

. . . Alkyl acrylates, alkyl methacrylates, cycloalkyl acrylates or cycloalkyl methacrylates

. . . . Polymethylmethacrylates (PMMA) *

. . . 2-Hydroxyethyl methacrylates (HEMA)

. . . Having oxyalkylene constitutions or polyoxyalkylene constitutions

. . . Fluoroalkyl acrylates, fluoroalkyl methacrylates, fluorocycloalkyl acrylates or fluorocycloalkyl methacrylates

. . Alpha-substituted acrylate units or beta-substituted acrylate units (AM18, AM22-AM27 take precedence)

. . . Alpha-halomethyl acrylates or alpha-trihalomethyl acrylates

AM32

AM33

AM34

AM36

AM38

AM39

AM40

. . Acrylic acids or methacrylic acids or their salts, halides, or anhydride units

. . Alpha-substituted acrylic acids or beta-substituted acrylic acids or their salts, halides, or anhydride units (AM18 or AM32 takes precedence)

. . . Alpha-halomethyl acrylic acids or alpha-trihalomethyl acrylic acids

. . Alpha, beta-unsaturated nitrile units (AM29 or AM33 takes precedence)

. . Alpha, beta-unsaturated carboxylic acid amide units or alpha, beta-unsaturated carboxylic acid imide units

. . . Maleimide compounds

. . . Polymethyl glutarimides (PMGI) *

AM42

AM43

AM45

AM46

AM48

AM49

. . Units having double bonds on rings (AM18 or AM39 takes precedence)

. . . Bicyclo compounds whose rings consist only of carbon

. . Olefin units

. . . Halogenated olefins

. . Polyene units

. . . Diene rubber *

AM52

AM53

AM54

AM57

AM58

AM60

. . Vinyl alcohol units or vinyl acetate units

. . . Polyvinyl alcohols (PVA) *

. . Vinyl ether units or vinyl ester units (AM52 takes precedence)

. . Compound units in which vinyl groups or allyl groups are bound to atoms other than carbon and oxygen

. . . Vinyl pyrrolidones

. . Sulfur dioxide units

AM61

AM62

AM64

AM66

AM67

AM68

AM70

. Polycondensates or polyaddition products

. . Polyesters

. . Polyurethanes

. . Polyethers (AM70 takes precedence)

. . . Poly(oxyethylenes) (AM26 takes precedence)

. . . Poly(oxypropylenes) (AM26 takes precedence)

. . Epoxy resins or phenoxy resins

AM72

AM73

AM74

AM75

AM76

AM77

AM79

AM80

. . Polyamides

. . . Precursors of polyimides

. . . . Containing siloxane chains in the main chain

. . . Precursors of polybenzoxazoles

. . . . Containing siloxane chains in the main chain

. . Polyimides or polybenzoxazoles

. . Phenolic resins or novolak resins

. . . Consisting only of phenols or cresols, and formaldehydes

AM82

AM84

AM85

AM86

AM88

AM90

. . Polycarbonates

. . Macromolecules containing silicon in the main chain

. . . Ladder polysiloxanes or orthosilicate condensates

. . . Polysiloxanes (AM74, AM76, or AM85 takes precedence)

. . Dendrimers

. . Having end modifications (AM88 takes precedence)

AM91

AM92

AM93

AM94

AM95

AM96

AM99

. Acidic groups

. . Carboxy groups (AM18, AM32-AM34, AM73, or AM74 takes precedence)

. . Phenolic hydroxyl groups (AM15, AM16, AM75, AM76, AM79, or AM80 takes precedence)

. Alcoholic hydroxyl groups (AM25, AM26, AM52, AM53, or AM70 takes precedence)

. Amino groups or imino groups

. Quaternary ammonium groups or quaternary iminium groups

. Containing fluorine atoms (AM27 takes precedence)

AN00
ORGANIC COMPOUND WHICH IS NOT COVERED BY ANY PLACE UNDER VIEWPOINTS AA-AM

AN01

AN02

AN03

AN04

AN05

AN07

AN08

AN10

. Organic acids or their salts, halides or anhydrides

. . Carboxylic acids

. . . Alpha-amino acids or their esters

. . . Acrylic acids *, methacrylic acids * or crotonic acids *

. . Sulfonic acids

. Esters or amides of inorganic acids (AN79 takes precedence)

. . Carbonates

. Hydrocarbon compounds

AN11

AN12

AN13

AN14

AN15

AN16

AN19

. Alcoholic hydroxyl groups (AN64 takes precedence)

. . Methanols *

. . Ethanols *

. . Polyol compounds (AN64 takes precedence)

. . . Ethylene glycols *

. . . Diethylene glycols * or triethylene glycols *

. Aldehyde groups

AN21

AN22

AN23

AN24

AN25

AN26

AN28

AN29

AN30

. Phenolic hydroxyl groups

. . Hydroquinones * or hydroquinone monoalkyl ethers *

. . Hindered phenols

. . Having two or three aromatic rings (AN23 takes precedence)

. . Having four or five aromatic rings (AN23 takes precedence)

. . Having six or more aromatic rings (AN23 takes precedence)

. Condensed, bridged, or spiro ring constitutions consisting only of carbon

. . Naphthalene constitutions or anthracene constitutions

. . Bridged cycloaliphatic ring constitutions

AN31

AN32

AN33

AN34

AN35

AN36

AN37

AN38

AN39

. Ethers, acetals, or ketals

. . Cyclic ethers

. . . Epoxy groups

. . Ethers of polyol compounds

. . . Ethers of ethylene glycols

. . . . Ethers of diethylene glycols * or ethers of triethylene glycols *

. . . Ethers of propylene glycols

. . . . Propylene glycol monomethyl ethers *

. . . . Propylene glycol monomethyl ether acetates *

AN41

AN42

AN43

AN44

AN45

AN46

AN47

AN49

AN50

. Ketones, including quinone constitutions

. . Cycloheptanones * or cyclohexanones *

. . Benzophenone compounds

. . Carbonyl groups bound to acyclic carbon

. . . 2-Heptanones *

. . . Methyl isobutyl ketones *

. . . Acetones * or methyl ethyl ketones *

. Halogen-containing compounds

. . Fluorine-containing compounds (BA32 takes precedence)

AN51

AN52

AN53

AN54

AN55

AN56

AN57

AN58

AN59

AN60

. Carboxylates (AN03 takes precedence)

. . Alkyl esters of phthalic acids * or dialkyl esters of phthalic acids *

. . Lactones

. . . Gamma-butyrolactones *

. . . Coumarin constitutions *

. . Without rings (AN03 or AN60 takes precedence)

. . . Ethyl lactates *

. . . Alkyl alkoxypropionates *

. . . Alkyl esters of acetic acids *

. . Acrylates or methacrylates

AN61

AN62

AN63

AN64

AN65

AN66

AN67

AN68

AN69

AN70

. Nitrogen-containing constitutions other than nitrogen-containing heterocyclic rings (AN75 takes precedence)

. . Amine compounds without aromatic rings (AN03 takes precedence)

. . . Trialkylamines or cycloalkylamines

. . . Ethanolamine compounds

. . Amine compounds having aromatic rings (AN03 takes precedence)

. . . Amine compounds having triphenylmethane constitutions *

. . Ammonium constitutions or iminium constitutions

. . Carboxylic acid amides

. . Isocyanate groups or blocked isocyanate groups

. . Hydrazine compounds

AN71

AN72

AN73

AN74

AN75

AN77

AN78

AN79

AN80

. Sulfur-containing constitutions other than sulfur-containing heterocyclic rings (AN05 takes precedence)

. . Mercapto groups

. . Sulfones or disulfones, sulfoxides, or sulfides

. . Sulfonates

. . Sulfonic acid amides or sulfonic acid imides

. Other compounds containing hetero atoms

. . Silicon-containing compounds (BA05 or BA33 takes precedence)

. . Phosphorus-containing compounds or phosphates

. . Organo-metallic compounds * (AN94-AN98 take precedence)

AN81

AN82

AN83

AN84

AN85

AN86

AN87

AN88

AN89

. Heterocyclic rings (AN32, AN33, or AN53-AN55 takes precedence)

. . Heterocyclic rings consisting only of carbon and nitrogen

. . . Lactam constitutions

. . . . N-methylpyrrolidones *

. . . Pyridine rings

. . . Imidazole compounds

. . . Benzotriazole compounds

. . Heterocyclic rings consisting only of carbon, nitrogen, and oxygen

. . Heterocyclic rings containing sulfur, selenium, or tellurium

AN91

AN92

AN93

AN94

AN95

AN96

AN97

AN98

AN99

. Polymethine constitutions *

. . Cyanine constitutions or merocyanine constitutions *

. . Styryl constitutions *

. Phthalocyanine constitutions *

. Anthraquinone constitutions *

. Azo constitutions *

. diketopyrrolopyrrole constitutions * or thioketopyrrolopyrrole constitutions *

. Other colour index registered pigments * (AN55, AN66, or AN91-97 takes precedence)

. Dendrimer constitutions *

AP00
INORGANIC COMPOUND WHICH IS NOT COVERED BY ANY PLACE UNDER VIEWPOINTS AA-AM

AP01

AP02

AP03

AP05

AP06

AP08

AP09

AP10

. Water *

. Carbon compounds (such as fullerenes)

. . Carbon blacks *

. Metals

. . Silver *

. Metal oxides, metal hydroxides, or metal salts

. . Calcium carbonates * or barium sulfates *

. . Titanium oxides * or titanium black *

AP11

AP13

AP15

AP17

AP19

. Silicas * or colloidal silicas *

. Glass *

. Natural minerals * (such as talcs, micas)

. Inorganic acids or their salts

. Ammonium salts (AN01-AN05 take precedence)

BA00
FUNCTION AS ADDITIVE

BA01

BA02

BA04

BA05

BA06

BA08

BA09

BA10

. Mixing two kinds of solvents

. Mixing three or more kinds of solvents

. Plasticisers

. Silane coupling agents

. Agents for improving adhesiveness (BA05 takes precedence)

. Stabilisers

. . Antioxidants or polymerisation inhibitors

. Ultraviolet absorbents or fog inhibitors

BA11

BA12

BA13

BA15

BA16

BA17

BA18

BA20

. Sensitisers

. . Infrared absorbents or photothermal conversion agents

. Polymerisation accelerators or chain-transferring agents

. Colour materials

. . Pigments

. . Dye

. . Discolouring or colouring

. Fillers

BA21

BA22

BA24

BA25

BA26

BA27

BA28

BA29

BA30

. Crosslinking agents acting before imagewise exposure

. Crosslinking agents acting after development

. Thermal acid generators

. Acid or base propagators

. Acid diffusion controlling agents or acid deactivation inhibitors

. Solubility suppressants (AL takes precedence)

. Solubility accelerators

. Liquid-repellency imparting agents or agents for imparting uneven distribution (hereinafter, AH50 takes precedence)

. . "Main chain-A-ester-R"

BA31

BA32

BA33

BA34

BA35

BA37

BA38

. Surfactants, defoamers or levelling agents

. . Fluorine-based

. . Silicon-based

. . Without containing fluorine and silicon

. Pigment dispersing agents or particle dispersing agents

. Conductivity imparting agents or antistatic agents

. Flame retardants

CA00
USE

CA01

CA02

CA03

CA04

CA05

CA06

CA07

CA08

CA09

. Printing plates

. . Relief printing plates or flexographic plates

. . Lithographic plates

. . . Lithographic plates for laser scanning exposure

. . Lithographic plates without needing damping water

. . Intaglio plates or gravure plates

. . Screen plates or stencil plates

. Photomasks

. Colour proofing

CA11

CA12

CA13

CA14

CA15

CA16

CA17

CA18

CA19

. Electrical or electronic components

. . Semiconductor integrated circuits

. . Printed circuit boards

. . Touch panels

. Optical parts

. . Colour filters

. . . RGB constitutions

. . . Black matrix constitutions

. . Microlenses

CA21

CA22

CA23

CA24

CA26

CA28

CA30

. Display devices

. . Liquid crystal display devices

. . Plasma display devices

. . Organic electroluminescence (EL) devices

. Magnetic recording apparatus

. Optical information recording media

. Other special uses

CB00
KIND OF EXPOSURE ENERGY

CB01

CB02

CB03

CB04

CB05

CB06

CB07

CB08

CB09

CB10

. Infrared rays, near infrared rays or infrared lasers

. Visible light to ultraviolet light (300 nm or more)

. . Lasers of visible light to ultraviolet light

. . . Blue or purple lasers

. . Mercury vapour lamps

. . . i-lines (365 nm)

. Far ultraviolet light or vacuum ultraviolet light (less than 300 nm)

. . Krypton fluoride (KrF) excimers (248 nm)

. . Argon fluoride (ArF) excimers (193 nm)

. . . Immersion exposure

CB11

CB13

CB14

CB15

CB17

CB18

CB20

. . Molecular fluorine (F2) excimers (157 nm)

. Extreme ultraviolet light, soft X-rays, or X-rays

. . Extreme ultraviolet (EUV) light

. . X-rays

. Charged particle rays

. . Electron rays

. Exposures exceeding diffraction limits of light (such as near field light)

CC00
IMAGE FORMING MODE

CC01

CC03

CC05

CC06

CC07

CC08

CC09

. Negative types

. Positive types

. Changing properties other than solubility

. . Changing adhesiveness or stickiness

. . Changing hydrophilicity or lipophilicity

. . Changing chemical reactivity

. . Changing transmission or refractive indexes

CC11

CC12

CC13

CC15

CC16

CC17

CC18

CC20

. Photocrosslinking (CC17 or CC18 takes precedence)

. Photopolymerisation (such as cationic polymerisation)

. . Radical polymerisation

. Chemical amplification with imagewise exposure parts being hydrophilic

. . Low-molecular-weight resists

. Chemical amplification with imagewise exposure parts being hydrophobic

. . Low-molecular-weight resists

. Photodepolymerisation

CC21

CC23

CC25

CC26

CC28

CC29

CC30

. By structurally changing o-quinonediazides

. By structurally changing functional groups in the side chain (CC15-CC18, or CC21 takes precedence)

. By ring closure of polyimide precursors

. By ring closure of polybenzoxazole precursors

. By reaction of LB films or monomolecular films

. Ablation

. By changing crystalline states, restricted to organic compounds

CD00
METHOD FOR FORMING IMAGE

CD01

CD02

CD05

CD06

CD07

CD09

. Multiplex imagewise exposure

. . Using multiple kinds of light sources

. Developers consisting only of organic solvents

. Developers consisting of mixtures of water and organic solvents

. Developers consisting of acidic or neutral aqueous solutions (CD06 takes precedence)

. Development on machines

CD11

CD12

CD14

CD15

CD16

CD18

CD20

. Colouring or discolouring images according to development processes (CD12 takes precedence)

. Using microcapsules

. Dry development (CD11 or CD12 takes precedence)

. . Powder development or toner development

. . Stripping development

. Patterning performed a plurality of times

. Directed Self-Assembly (DSA)

DA00
LAYER STRUCTURE, RESTRICTED TO FEATURES OF THE INVENTION

DA01

DA02

DA03

DA04

DA05

. Characterised by constitutions of image forming layers, excluding photosensitive transfer materials

. . Having a plurality of image forming layers (CD12 takes precedence)

. . . Having non-imaging layers between image forming layers (CD12 takes precedence)

. . . Contrast enhancement layers (CEL)

. . Specifying distributions of components

DA11

DA12

DA13

DA15

DA17

DA19

. Bases, excluding photosensitive transfer materials

. . Specifying surface shapes

. . Specifying materials other than metals

. Rear surface layers, excluding photosensitive transfer materials

. Image receiving layers or transferred layers

. Specific relationships between layers

DA21

DA22

DA23

DA24

DA25

DA26

. Layer structures of photosensitive transfer materials

. . Characterised by temporary bases

. . Characterised by protective films

. . Characterised by constitutions of image forming layers

. . . Having a plurality of image forming layers

. . Characterised by non-imaging layers (DA22 or DA23 takes precedence)

EA00
PRELIMINARY TREATMENT OR LAYER FORMING METHOD, RESTRICTED TO FEATURES OF THE INVENTION

EA01

EA02

EA03

EA06

. Preparing or manufacturing compositions or components

. . Impurities

. Storing compositions

. Pre-treatments to bases

EA11

EA12

EA13

EA14

EA15

EA16

EA18

EA19

. Forming layers

. . Coating

. . . Spin coating

. . . Slit and spin coating

. . . Slit coating

. . Vapour deposition (PVD, CVD)

. . Langmuir-Blodgett (LB) methods

. . Lamination methods

EA21

EA22

EA23

EA24

EA26

. After-treatments of layer formation

. . Heating or drying

. . Full preliminary exposure

. . Removing surplus coating materials

. Washing the devices used for forming layers

2H225	MATERIALS FOR PHOTOLITHOGRAPHY
	G03C3/00 ,301;G03F7/004-7/04;7/06,501;7/075-7/115;7/16-7/18