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F-Term-List

5F157 CLEANING OR DRYING SEMICONDUCTORS
H01L21/304 ,641-21/304,651@Z
H01L21/304,641-21/304,651@Z AA AA00
SHAPE OR FORM OF OBJECT TO BE CLEANED 		AA01 AA02 AA03 AA04 AA05 AA07 AA08 AA09
. Shapes . . rectangular plate-like . . circular plate-like . . flexible plate-like . . spherical . Forms . . Surfaces being smooth . . Surfaces having projections and recesses
AA11 AA12 AA13 AA14 AA15 AA16 AA17
. characterised by areas to be cleaned . . Periphery . . Centre parts . . End or side surfaces . . Rear surfaces . . Front surfaces or rear surfaces . . . Both of front and rear surfaces simultaneously
AA21 AA22 AA23 AA24 AA28 AA29 AA30
. Components of objects to be cleaned . . Semiconductors of group IV . . Semiconductors of group III and group V . . Semiconductors of group II and group VI . . Silicon compounds . . . Silicon oxides . . . Silicon nitrides
AA32 AA34 AA35 AA36
. . Low-k films . . Aluminium (Al) or aluminium (Al) compounds . . Copper (Cu) or copper (Cu) compounds . . Other metals or metal compounds
AA41 AA42 AA43 AA44 AA45 AA46 AA47 AA48 AA49 AA50
. Matters removed from objects to be cleaned . . Organic substances . . Inorganic substances . . Ions . . Halogens . . Compounds containing metals or metal ions . . . containing aluminium (Al) . . . containing titanium (Ti) . . . containing iron (Fe) . . . containing nickel (Ni)
AA51 AA52 AA53 AA54 AA55 AA56 AA57
. . . containing copper (Cu) . . . containing zinc (Zn) . . . containing gallium (Ga) . . . containing ruthenium (Ru) . . . containing palladium (Pd) . . . containing silver (Ag) . . . containing indium (In)
AA62 AA63 AA64 AA65 AA66 AA67 AA68 AA69 AA70
. . Residues of previous processes . . . of etching . . . of resists . . . . of ashing . . Agents used in previous processes . . . Developers . . . Separating liquids . . . Etching liquids . . . Abrasive agents or abrasive materials
AA71 AA72 AA73 AA74 AA75 AA76 AA77 AA78 AA79
. . . Cleaning liquids . . Others . . . Particles . . . Oils and fats . . . Flux . . . Films . . . . Oxide films . . . Strain on semiconductor surfaces . . . Watermarks
AA81 AA82 AA84 AA85 AA86 AA88
. Relationships with manufacturing processes for semiconductors . . Initial cleaning . . prior to film formation processes . . . prior to CVD treatment . . . prior to PVD treatment . . prior to lithography processes
AA91 AA92 AA93 AA94 AA95 AA96 AA97 AA98 AA99
. . during lithography processes . . . after developing . . . after etching . . . after ashing . . after wiring . . . after CMP . . . after plating . . during dicing processes . . . after dicing
AB AB00
HANDLING OBJECT TO BE CLEANED 		AB01 AB02 AB03
. supporting objects to be cleaned . . supporting a single object to be cleaned . . simultaneously supporting a plurality of objects to be cleaned
AB12 AB13 AB14 AB16 AB17 AB18 AB19 AB20
. . Supporting means . . . putting on supporting members or inserting into cassettes . . . pinching or pinching with a plurality of supporting means . . . sucking . . . having elastic members . . . Floating by magnetism or the like . . . varying supporting force . . . changing supporting positions
AB22 AB23 AB24 AB25 AB26
. . Holding means . . . preventing floating . . . preventing falling . . . aligning . . . preventing warpage
AB32 AB33 AB34 AB35 AB36
. . Attitudes of objects to be cleaned . . . horizontal . . . vertical . . . inclined . . . variable
AB41 AB42 AB44 AB45 AB46 AB47 AB48 AB49 AB50
. Arrangement of treatment tanks or chambers . . A single treatment tank or chamber . . A plurality of treatment tanks or chambers . . . arranged vertically . . . . arranged linearly . . . arranged horizontally . . . . arranged linearly . . . . arranged radially to base points . . . Parallel treatment
AB51 AB52
. Transfer between treatment tanks or chambers . Transfer within treatment tanks or chambers
AB61 AB62 AB63 AB64
. Modes of transfer or arrangement of ports for carrying-in and -out . . Linear movement . . Rotary movement . . combining linear movement and rotary movement
AB72 AB73 AB74 AB75
. . Ports for carrying-in and -out being the same . . . under surfaces of treatment tanks . . . on surfaces of treatment tanks . . . at side walls of treatment tanks
AB82 AB83 AB84 AB88 AB89 AB90
. . Ports for carrying-in and -out being separated . . . Ports for carrying-in or -out being top or bottom surfaces . . . Ports for carrying-in or -out being on side walls . Movement during cleaning within treatment tanks or chambers . . Rotary movement . . . Vertical axis
AB91 AB92 AB93 AB94 AB95 AB96 AB97 AB98
. . . Horizontal axis . . . Inclined axis . . . Reactive rotation . . Linear movement . . . Reciprocating movement . . . . Swinging . . . Zigzag movement . . Relative movement to cleaning means
AC AC00
MODE OF CLEANING, WASHING-OUT, OR DRYING PROCESS 		AC01 AC02 AC03 AC04
. characterised by cleaning processes . characterised by washing-out processes . characterised by drying processes . characterised by integrated processes
AC11 AC12 AC13 AC14 AC15
. A single tank or chamber . . A single process . . . Cleaning . . . Washing-out . . . Drying
AC22 AC23 AC24 AC25 AC26 AC27
. . A plurality of processes . . . Cleaning and drying . . . Washing-out and drying . . . Cleaning and washing-out . . . Cleaning washing-out and drying . . . Other processes at other positions
AC32 AC33 AC34 AC35
. . A plurality of kinds of treatment . . . Cleaning . . . Washing-out . . . Drying
AC41 AC42 AC43 AC44 AC45
. A plurality of tanks or chambers . . A single process . . . Cleaning . . . Washing-out . . . Drying
AC52 AC53 AC54 AC55 AC56
. . A plurality of processes . . . Cleaning and drying . . . Washing-out and drying . . . Cleaning and washing-out . . . Cleaning washing-out and drying
AC62 AC63 AC64 AC65
. . A plurality of kinds of treatment within the same tank . . . Cleaning . . . Washing-out . . . Drying
BA BA00
CLEANING WITH TOOL, BRUSH, OR SIMILAR MEMBER 		BA01 BA02 BA03 BA04 BA05 BA06 BA07 BA08 BA09 BA10
. Contact systems . . Brushes . . . characterised by forms or shapes . . Scrapers . . Striking bodies . . . granular or spherical . . Water-absorbing bodies or sponges . . Flexible bodies or fabrics . . Holding bodies . . Adhering or bonding
BA11 BA12 BA13 BA14
. Slide-contact systems . . Rotary types . . . Vertical rotation i.e. rotary shafts being orthogonal to surfaces to be cleaned . . . Horizontal rotation i.e. rotary shafts being parallel to surfaces to be cleaned
BA22
. . Non-rotary types
BA31
. supplying liquids simultaneously
BA41
. supplying gases simultaneously
BA51
. sucking simultaneously
BB BB00
CLEANING FORM OR SYSTEM BY LIQUID 		BB01 BB02 BB03 BB04 BB05 BB06 BB07 BB08 BB09
. Dipping . . Cleaning tanks . . Means for water supply and drainage . . . Means for overflows . . . Means for downflows . . . Means for supplying or mixing detergent liquids . . rectifying flows of cleaning liquids . . Agitating . . blowing-out cleaning liquids
BB11 BB12 BB13 BB14
. Injecting bubbling or spraying . . Cleaning methods . . . Jet cleaning or high-pressure spraying . . . Order of injection
BB22 BB23 BB24 BB25
. . attaching or arranging nozzles . . . A plurality of pipe arrangement . . . in a plurality of directions . . . eccentrically
BB32 BB33 BB34 BB35 BB36 BB37 BB38 BB39
. . Structures of nozzles . . . with a plurality of holes . . . . injecting in a plurality of directions . . . regulating pressure . . . Mixing . . . . Liquids and gases . . . . Liquids and liquids . . . Handling when nozzles are not used
BB42 BB43 BB44 BB45
. . Movable means . . . Rotation . . . Reciprocating movement . . . . Swinging movement
BB52 BB53
. . generating flows . . . by sucking cleaning liquids
BB61 BB62 BB64 BB66
. Aids for cleaning . . Electrolysis . . Plasma . . heating or cooling cleaning liquids
BB72 BB73 BB74 BB75 BB76 BB77 BB79
. . Wave motion or vibrations . . . Ultrasonic waves . . . Sound pressure or frequency . . . Light . . . . Ultra-violet light . . . . Lasers . . Bubbles or cavitation
BC BC00
CLEANING BY CLEANING LIQUID COMPONENT 		BC01 BC02 BC03 BC04 BC05 BC07 BC08 BC09
. Cleaning liquids . . Composition formulae . . Amounts or ratios of composition . . Number of carbon atoms . . Components not contained . . pH values . . Acid dissociation constants or base dissociation constants . . Redox potential values
BC12 BC13 BC14 BC15 BC16 BC17 BC18 BC19
. . Temperature . . Concentration . . Pressure . . Speed . . Resistivity . . Surface tension . . Viscosity . . Contact angles
BC31 BC32 BC33 BC34 BC35 BC36
. Liquid conditions . . Liquefied gases . . Supercritical fluids . . . Carbon dioxide . . Aerosols solid solutions or misty states . . Emulsions
BC41
. characterised by refining methods of liquids
BC51 BC52 BC53 BC54 BC55
. Methods of using cleaning liquid components . . Mixing . . . mixing two or more components covered by BE01-BE70 . . . mixing components covered by BE01-BE70 and those covered by BF01-BF39 . . . mixing two or more components covered by BF01-BF39
BC62 BC63 BC64 BC65 BC66 BC67 BC68 BC69 BC70
. . using sequentially in a plurality of processes . . . using gases and then liquids . . . using liquids and then gasses . . . using inorganic components and then some component . . . using organic components and then some component . . . using mixture of organic and inorganic components and then some component . . . using some component and then inorganic components . . . using some component and then organic components . . . using some component and then mixture of organic and inorganic components
BD BD00
CLEANING BY CLEANING LIQUID COMPONENT CHARACTERISED BY COMPONENT 		BD01 BD02 BD03 BD04 BD05 BD06 BD07 BD08 BD09 BD10
. mixing in cleaning liquids which are described in claims . . Surfactants . . Complexing agents or chelating agents . . pH adjusters . . Oxidising agents . . Reducing agents . . Buffering agents . . Stabilisers . . Corrosion inhibitors . . Reaction accelerators
BD12
. . Viscosity modifiers
BD22 BD23 BD24 BD25 BD26 BD27 BD28
. . Gases . . . Oxidising gas . . . Reducing gas . . . Hydrogen gas . . . Nitrogen gas . . . Ammonia gas . . . Oxygen gas
BD33 BD34 BD35 BD36
. . . Ozone gas . . . Chlorine gas . . . Carbon dioxide gas . . . Rare gas
BD42 BD43 BD44
. . Solids . . . Ice grains . . . Metals
BD51 BD52 BD53 BD54 BD55 BD57 BD58
. removed from cleaning liquids . . Metals or metal ions . . Ions other than metals . . Gases . . Moisture . . Other organic compounds . . Other inorganic compounds
BE BE00
CLEANING BY INORGANIC CLEANING LIQUID COMPONENT 		BE01
. Inorganic components which are described in claims
BE12
. . Pure water
BE22 BE23
. . Peroxides . . . Hydrogen peroxide
BE32 BE33 BE34 BE35
. . Alkali . . . Aqueous ammonia . . . Aqueous ammonium fluoride . . . Alkali metal hydroxides
BE42 BE43 BE44 BE45 BE46 BE47 BE48
. . Acids . . . Sulphuric acid . . . Hydrochloric acid . . . Nitric acid . . . Fluoric acid . . . Silicic acid . . . Phosphoric acid
BE52 BE53 BE54 BE55 BE56 BE57 BE58 BE59 BE60
. . Salts or ions . . . containing sulphur (S) . . . containing chlorine (Cl) . . . containing nitrogen (N) . . . . Nitrate or nitrate ions . . . . Ammonium salts or ammonium ions . . . containing fluorine (F) . . . containing silicon (Si) . . . containing phosphorus (F)
BE63 BE64 BE65 BE66 BE68 BE69 BE70
. . . containing sodium (Na) . . . containing aluminium (Al) . . . containing potassium (K) . . . containing carbonates (CO3) . . . containing other elements . . . . Halogens . . . . Metals
BF BF00
CLEANING BY ORGANIC CLEANING LIQUID COMPONENT 		BF01 BF02 BF03 BF04 BF05 BF06
. Components which are described in claims . . Hydrocarbons . . Halogenated hydrocarbon . . . Substituents being fluorine (F) . . . Substituents being chlorine (Cl) . . . Substituents being fluorine (F) and chlorine (Cl)
BF12
. . Organic acids or organic acid salts
BF22 BF23 BF24
. . Alcohols . . . Glycols . . . Phenols
BF32 BF33 BF34 BF35 BF36 BF37 BF38 BF39
. . Ethers . . Ketones . . Esters . . Aldehydes . . Saccharides . . Organic alkalis . . . Organic amines . . . . Quaternary ammonium compounds
BF41 BF42 BF43 BF44 BF45 BF46 BF47 BF48 BF49
. Chemical formulae e.g. [Chemical 1] being described . . Straight chain structures . . . chained and unsaturated . . . chained and saturated . . Cyclic structures . . . unsaturated . . . saturated . . . . Benzene rings . . . Heterocyclic compounds
BF52 BF53 BF54 BF55 BF56 BF57 BF58 BF59 BF60
. . Alcohols (-OH) . . . Glycols (-OH)2 . . Ethers (-O-) . . Ketones (-CO-) . . Esters (-COO-) . . Aldehydes (-CHO) . . Carboxyl groups (-COOH) . . Alkyl groups . . Phenyl groups
BF62 BF63
. . containing sulphur (S) . . . Sulfonic acid groups (-SO2OH)
BF72 BF73 BF74 BF75
. . containing nitrogen (N) . . . Amino groups (-NH2) . . . Nitro groups (-NO2) . . . Azido group (-N3)
BF82 BF83
. . containing silicon (Si) . . . Siloxane groups (-SiO)
BF92 BF93 BF94 BF95 BF96 BF97
. . containing halogens . . . containing fluorine (F) . . . containing chlorine (Cl) . . containing boron (B) . . containing phosphorus (P) . . containing other elements
BG BG00
CLEANING BY GAS 		BG01 BG02 BG03 BG04 BG05 BG06
. Kinds of cleaning media . . Active gases . . . Ozone . . . Oxygen . . . Hydrogen . . . containing fluorine
BG12 BG13 BG14 BG15
. . Inert gases . . . Nitrogen . . . Argon . . . Helium
BG22 BG23 BG24 BG25 BG27
. . Vapour . . . Water vapour . . . Hydrogen fluoride . . . Trichloroethylene . . . similar to wet cleaning
BG32 BG33 BG34 BG35 BG36 BG37 BG39
. . Plasma . . . Oxygen . . . Nitrogen . . . Hydrogen . . . Helium . . . Argon . . Combination of a plurality of cleaning media
BG42 BG43 BG44 BG45 BG46 BG47 BG48 BG49 BG50
. . Light . . . Ultra-violet radiation . . . . Ultra-violet wavelengths . . . . having direct actions on organic substances . . . . generating ozone . . . . generating excited oxygen atoms . . . . characterised by generation sources . . . Laser irradiation . . . Photocatalysts
BG53 BG54 BG55 BG56 BG58
. . . X-rays . . . . X-ray wavelengths . . . . characterised by generation sources . . . Others . . Ions
BG61 BG62 BG63
. mixing other substances into cleaning media . . containing solid particles in cleaning media . . mixing liquids in cleaning media
BG71 BG72 BG73 BG74 BG75 BG76 BG77
. relating to generation of cleaning media . . characterised by generation devices . . characterised by generation methods . using cleaning media . . characterised by conditions of cleaning media . . . Temperature . . . Concentrations
BG82 BG83 BG84 BG85 BG86
. . characterised by supply means to objects to be cleaned . . . increasing pressure . . . Circumfluence or swirling . . . attaching or arranging nozzles . . . Structures of nozzles
BG91 BG92 BG93 BG94 BG95 BG96 BG97
. generating flows . . Sucking . . . Combinations with other cleaning means . . Jetting . . . Combinations with other cleaning means . . Sucking and jetting . . . Combinations with other cleaning means
BH BH00
OTHER CLEANING OR AUXILIARY MEANS 		BH01 BH02
. Calcination . Explosion
BH11 BH12 BH13 BH14 BH15 BH16 BH17 BH18 BH19
. Auxiliary means for cleaning . . Magnetic treatment . . imparting conductivity . . removing static electricity or preventing static electricity generation . . Radical generation . . Light shading . . vibrating objects to be cleaned . . heating objects to be cleaned . . cooling objects to be cleaned
BH21
. . characterised by atmospheres or atmospheric gases
CA CA00
PRELIMINARY CLEANING, E.G. PREPARATION OF CLEANING 		CA01 CA02 CA03 CA04 CA05
. Heating . . Pure water . . Chemical liquids . . Gases . . Objects to be cleaned
CA11 CA12 CA13
. adjusting concentrations . . Chemical liquids . . Gases
CA21 CA22 CA23 CA24 CA25
. Cooling . . Pure water . . Liquid chemicals . . Gases . . Objects to be cleaned
CA31
. Vacuum atmosphere
CA41
. Storage
CB CB00
POST-TREATMENT OF CLEANING OR SERIES OF POST-TREATMENT 		CB01 CB02 CB03 CB04
. Washing-out or rinsing . . characterised by rinsing liquids . . . Pure water . . characterised by methods of applying rinsing liquids
CB11 CB12 CB13 CB14 CB15 CB16 CB17 CB18
. Draining or drying . . Shaking and drying . . . Spin-drying . . IPA substitution . . blasting air . . . Air knives . . Water absorption or suction . . . Water absorption rolls or squeezing rolls
CB22 CB23 CB24 CB26 CB27 CB28 CB29
. . Heating . . . Hot air . . . Infra-red rays . . Supercritical fluids . . . Carbon dioxide . . Dry atmospheres . . Vacuum drying
CB31 CB32
. Inspections . . Evaluations
CB41
. Storage
CC CC00
CLEANING PART OTHER THAN SUBSTRATE 		CC01 CC02 CC03
. cleaning or regenerating cleaning means . . Recovery of or filtering cleaning fluids . . cleaning brushes or the like
CC11
. cleaning inside of cleaning devices
CC21
. Containers
CC31
. Handling tools
CC41
. cleaning pipe arrangement
CD CD00
DETECTION OR CONTROL (1) 		CD01 CD02 CD03 CD04 CD05 CD06 CD07 CD08 CD09 CD10
. Detected information . . cleaning washing-out or drying operations . . . Presence or absence of operations . . . Time duration . . . . Operation time . . . . Dwell time . . . Operation speed . . . Transfer of processes . . . Presence or absence of objects to be cleaned . . . Presence or absence of cleaning agents
CD11 CD12 CD13 CD14 CD15 CD16
. . Objects to be cleaned . . . Number or amounts . . . Sizes . . . Materials . . . Degrees of contamination . . . Positions
CD21 CD22 CD23 CD24 CD25 CD26 CD27 CD28 CD29
. . Devices . . . Conditions of opening and closing . . . Loads or torque . . . Voltages electric currents or electric power . . . Vibrations . . . Cumulative operation time . . . Positions of movable elements . . . . Positions of carrier arms . . . Abnormal conditions
CD31 CD32 CD33 CD34 CD35 CD36 CD37
. . Cleaning liquids or cleaning agents . . . Amounts . . . Temperature . . . Concentrations . . . Kinds or quality . . . Turbidity or degrees of contamination . . . Degassing levels
CD41 CD42 CD43 CD44 CD45 CD46 CD47 CD48 CD49
. . Washing-out liquids . . . Amounts . . . Temperature . . . Turbidity or degrees of contamination . . Dry gases or vapour . . . Amounts . . . Temperature . . . Humidity . . . Pressure
CE CE00
DETECTION OR CONTROL (2) 		CE01 CE02 CE03 CE04 CE05 CE06 CE07 CE08 CE09 CE10
. Objects to be controlled . . Cleaning washing-out or drying operations . . . starting or ending operations operating or stopping . . . Time . . . . Operation time . . . . Dwell time . . . Operation speed . . . Transfer of processes . . . carrying-in and -out objects to be cleaned . . . supplying agents
CE11
. . . discharging agents
CE21 CE22 CE23 CE24 CE25 CE26 CE27 CE28 CE29
. . Devices . . . Casings cleaning tanks or chambers doors or covers . . . . Positions or attitudes . . . Injection nozzles . . . . Positions or attitudes . . . Cleaning brushes . . . . Positions or attitudes . . . controlling light-associated devices . . . determining time for replacement
CE31 CE32 CE33 CE34 CE35 CE36 CE37 CE38
. . Cleaning liquids or cleaning agents . . . Amounts . . . selecting cleaning liquids . . . Replacement . . . Regeneration . . . Temperature . . . Concentrations . . . Degassing levels
CE41 CE42 CE43 CE44
. . Washing-out liquids . . . Amounts . . . Temperature . . . Regeneration
CE51 CE52 CE53 CE54 CE55 CE56 CE57 CE59
. . Dry gases or vapour . . . Amounts . . . . Intake volume . . . . Exhaust volume . . . Temperature . . . Humidity . . . Pressure . . Objects to be cleaned
CE61 CE62 CE63 CE64 CE65 CE66
. . Atmospheres . . . reducing pressure . . . Vacuum . . . applying pressure . . . reducing and applying pressure . . . equal to atmospheric pressure
CE72 CE73 CE74 CE75 CE76 CE77 CE78 CE79
. . . Heating . . . Cooling . . . Heating and cooling . . . equal to ambient air e.g. room temperature or ordinary temperature . . . Air supply . . . Air discharge . . . Air circulation . . . forming different atmospheres simultaneously
CE81 CE82 CE83 CE84 CE85 CE86 CE87 CE89
. Treatment or control methods . . Special control theories . . correcting according to other circumstances . . operating input information . . . normalising or correcting input information . . Control variables . . . Loads or torque . . . Voltages currents or power
CF CF00
COMPONENT DETAIL 		CF02 CF04 CF06 CF08 CF10
. Motors . Pumps . Ultrasonic vibrations . . Structures of oscillators . . attaching or arranging oscillators
CF12 CF14 CF16 CF18 CF20
. Power transmission mechanisms . Valves . Intake and exhaust structures . . characterised by inlets . . characterised by outlets
CF22 CF24 CF28 CF30
. Lids doors or partitions . Seals . Curtains . . Air curtains
CF32 CF34 CF36 CF38 CF40
. Hoods . Heaters or heating elements . Heat exchangers . . Cooling . Light sources
CF42 CF44 CF46 CF48 CF50
. Sensors or detecting means . Control substrates . Electromagnetic elements excluding motors . Power sources wiring or connectors . Announcing or displaying means
CF52 CF54 CF56 CF58 CF60
. Remote control or networks . Timers or timing means . Counting means . Operating means . Pipe arrangement
CF62 CF64 CF66 CF68 CF70
. Materials . . Cleaning tanks . Shapes or construction of cleaning tanks . Assembling . Fans
CF72 CF74 CF76 CF80
. Arrangement of components . Filters . Arrangement of devices . Surrounding environments or atmospheres
CF82 CF86 CF88 CF90
. Monitoring records . Construction of cleaning devices . . Casings . . Chambers
CF92 CF93 CF94 CF96 CF98 CF99
. . . with movable elements . . Carriers jigs for cleaning or cleaning containers . Clean rooms or benches . Buffers . Containers for accommodating semiconductors excluding those during cleaning . Cleaning liquid tanks
DA DA00
FOR THE PURPOSE OF ENSURING SAFETY 		DA01
. preventing hazards or injuries
DA11 DA12 DA13 DA14 DA15 DA16
. Environmental sanitation . . preventing noise e.g. silencing insulating sounds or soundproofing . . suppressing or preventing vibrations . . preventing vaporisation . . preventing contamination by draining or waste liquids . . Measures against liquid leakage
DA21
. preventing damage to objects to be cleaned
DA31
. preventing mechanical or electrical damage or troubles
DA41 DA42 DA43
. preventing leakage . . watertight e.g. drip-proof or waterproof . preventing deformation or physical damage or enhancing durability
DA51
. Measures against electric power failures
DA61
. preventing freezing
DA71
. Measures against incorrect operations
DA81
. Fail safe
DA91
. Foolproof
DB DB00
FOR THE PURPOSE OF OPTIMUM TREATMENT 		DB01 DB02 DB03
. improving cleaning efficiency . . Cleaning devices being object of improvement . . Cleaning liquids being object of improvement
DB11 DB12 DB13 DB14 DB15 DB16 DB17 DB18 DB19 DB20
. improving cleaning effects . . preventing deterioration of cleaning liquids up to points of use . . improving wettability . . modifying surfaces . . . Hydrophilisation . . forming oxidised films for removing entire oxidised films . . promoting reactions . . removing specific foreign matters . . preventing separation of cleaning liquids . achieving both cleaning effects and efficiency
DB21 DB22 DB23 DB24 DB28
. improving washing-out efficiency . . Cleaning devices being object of improvement . . Washing-out liquids being object of improvement . improving washing-out effects . achieving both washing-out effects and efficiency
DB31 DB32 DB33 DB34 DB36 DB37 DB38
. improving drying efficiency . . Cleaning devices being object of improvement . . Drying media being object of improvement . improving drying effects . achieving both drying effects and efficiency . preventing uneven cleaning washing-out or drying . Cross-contamination
DB41 DB43 DB45 DB46 DB47
. saving water or saving cleaning water . Measures for large-sized or large area substrates . Time reduction . . Lead time . . Yields or operating rates
DB51 DB53 DB54 DB55 DB57 DB58 DB59
. preventing reattachment . . Repulsion by electric charges . Protection by oxidised film formation . suppressing oxidised film formation . suppressing corrosion . preventing fluorine (F) atom from remaining . Hydrogen (H) sealing
DC DC00
SOLVING OTHER PROBLEM 		DC01
. Automation or laboursaving
DC11
. improving operability
DC21
. improving processes for manufacturing and assembling detection or failure diagnoses
DC31
. simplifying structures reducing the number of parts or improving materials
DC41
. improving transportation or packaging
DC51
. Miniaturisation or space-saving
DC61
. preventing ozone layer destruction e.g. adopting alternatives for chlorofluorocarbon
DC71
. preventing microorganisms from propagating or cleaning liquids from decaying
DC81 DC82 DC83 DC84 DC85 DC86 DC87 DC88 DC90
. reducing energy consumption or power transmission losses . . Long-term use of cleaning liquids e.g. preventing deterioration . . reusing cleaning liquids . . . Recovery of cleaning liquids . . . regenerating or separating cleaning liquids . . . circulating cleaning liquids . . improving efficiency of heat-transfer . . Long-term use of consumable parts . Countermeasures to contamination caused by devices
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