F-Term-List

G03F7/004-7/04;7/06,501;7/075-7/115;7/16-7/18

AA00
PURPOSE

AA01

AA02

AA03

AA04

AA06

AA07

AA08

AA09

AA10

. Sensitivity

. Resolution

. Pattern shape improvement

. Developability or image reproducibility

. Solvent resistance

. Acid resistance

. Alkali resistance

. Dry etching resistance

. Heat resistance

AA11

AA12

AA13

AA14

AA15

AA16

AA17

AA18

AA19

AA20

. Weatherability

. Print durability

. Film strength or scratch resistance

. Adhesiveness

. Non-adhesiveness

. Peelability

. Transferability

. Smoothness

. Conductivity

. Insulation

AB00
USE

AB01

AB02

AB03

AB04

AB05

AB06

AB08

AB09

. Printing plates

. . Letterpress plates or flexographic plates

. . Lithographic plates or pre-sensitized plates

. . . Waterless plates

. . Intaglio plates or gravure plates

. . Stencils

. Photographic originals or photomasks

. Colour proofs

AB11

AB13

AB14

AB15

AB16

AB17

AB20

. Dry films

. Manufacturing colour filters

. Manufacturing other optical parts

. Manufacturing printed circuits

. Manufacturing semiconductor elements or integrated circuits

. Manufacturing other electrical components or electronic parts

. Other special uses

AC00
TYPE OF EXPOSURE ENERGY

AC01

AC03

AC04

AC05

AC06

AC07

AC08

. Visible light or near ultraviolet rays

. Other high energy beams

. . Deep ultraviolet rays (deep UV)

. . X-rays

. . Electron beam (EB)

. . Ion beams

. . Laser beams

AD00
IMAGE FORMATION MODE

AD01

AD03

AD05

AD06

AD07

. Negative types

. Positives types

. Both negative and positive types

. . changed by exposure methods

. . changed by developing methods

BA00
DIAZO OR AZIDE PHOTOSENSITIVE MATERIAL

BA01

BA02

BA03

BA04

BA06

BA07

BA08

BA10

. Diazonium compounds, excluding o-quinonediazide compounds

. . characterised by salts or anions

. . Diazo resins

. . p-quinonediazide compounds

. Azide compounds

. . Bis-azide compounds

. . Polymers having azide groups

. containing silicon

BB00
INORGANIC PHOTOSENSITIVE MATERIAL

BB01

BB03

BB04

BB10

. Chromates

. Inorganic resists

. . Chalcogenides

. containing silicon

BC00
CARBON-TO-CARBON UNSATURATED GROUP-CONTAINING PHOTOSENSITIVE MATERIAL

BC01

BC02

BC03

BC04

BC05

BC06

BC07

BC08

BC09

BC10

. Unsaturated groups

. . Dimeric types

. . . Cinnamoyls or cinnamic acids

. . . Cinnamylidenes

. . . Benzalcetophenones, i.e. chalcone

. . . Stilbenes

. . . Alpha-phenylmaleimides

. . . Furylacryloyls

. . . Styrylpyridiniums or stilbazoliums

. . . Styrylketones

BC12

BC13

BC14

BC15

BC17

BC18

BC19

BC20

. . Addition polymerisation types

. . . Acrylics or methacrylics

. . . . Acryloyl groups or methacryloyl groups

. . . . Acrylamide, methacrylamide, acrylimide or methacrylimide groups

. . . Groups other than acrylics or methacrylics

. . . . Maleic acid diesters

. . . . Allyl groups

. . . . Vinylamino groups

BC23

BC24

BC29

. . . . Vinylether groups

. . . . Vinylethioether groups

. . . . Acetylenic unsaturated groups

BC31

BC32

BC33

BC34

BC35

BC36

BC37

BC38

BC40

. Unsaturated monomers

. . Monofunctional monomers

. . . Unsaturated carboxylic acids or salts

. . . Unsaturated carboxylic acid esters

. . . Unsaturated carboxylic acid amides or imides

. . . Acrylonitriles

. . . Styrenes

. . . Other unsaturated monomers

. . . containing silicon

BC42

BC43

BC44

BC45

BC46

BC47

BC48

BC49

BC50

. . Polyfunctional monomers

. . . Unsaturated acid esters of polyol

. . . Unsaturated esters of polyhydric carboxylic acids

. . . Urethane-type unsaturated acid esters

. . . Unsaturated acid amides

. . . Divinyl benzenes

. . . Triarylisocyanurates

. . . Other polyfunctional monomers

. . . containing silicon

BC51

BC52

BC53

BC54

BC55

BC56

. Polymers or prepolymers containing unsaturated groups

. . Addition polymers

. . . Acrylic polymers, methacrylic polymers, acrylic copolymers or methacrylic copolymers

. . . Maleic acid polymers or copolymers

. . . Diene polymers or copolymers

. . . Polyvinyl alcohol, including polyvinyl acetates

BC62

BC63

BC64

BC65

BC66

BC67

BC68

BC69

BC70

. . Condensation polymers or polyaddition polymers

. . . Polyesters having unsaturated groups in the main chain

. . . Polyesters having unsaturated groups in the side chain or at the end

. . . Polyethers

. . . Polyurethanes

. . . . Polyester-polyurethane

. . . Polyamides

. . . Polyimides and precursors thereof

. . . having other aromatic condensed rings and precursors thereof

BC72

BC73

BC74

BC77

BC78

BC79

. . . Phenol resins

. . . . Novolak resins

. . . Epoxy resins

. . Polymers or prepolymers containing silicon

. . . Polysiloxanes or polysiloxanes in ladder shape

. . . containing silicon atoms in side chains

BC81

BC82

BC83

BC84

BC85

BC86

BC87

BC88

. Monomers and polymers or prepolymers having specific definitions

. . specified by the number of unsaturated groups

. . specified by groups other than unsaturated groups

. . . Acidic groups

. . . . Carboxyl groups

. . . Hydroxyl groups

. . . Basic groups

. . . Functional groups having polymerisation initiator functions

BC92

BC93

BC94

BC95

BC96

BC97

. . Molecular weight

. . . Molecular weight distribution

. . Viscosity

. . Elasticity

. . Melting point or softening point

. . Glass transition temperature

BD00
OTHER INSOLUBLE PHOTOSENSITIVE MATERIALS

BD01

BD02

BD03

BD04

BD06

BD07

BD08

BD09

BD10

. Non-macromolecular compounds

. . having oxygen-containing photosensitive groups

. . . having epoxy groups or glycidyl groups

. . . Oxygen-containing heterocyclic compounds

. . having nitrogen-containing photosensitive groups

. . . Nitro, i.e. nitro group-containing, compounds

. . . Nitrons

. . . Tertiary amino, i.e. tertiary amine-containing, compounds

. . . Nitrogen-containing heterocyclic compounds

BD12

BD13

BD20

. . having sulfur-containing photosensitive groups

. . . Sulfur-containing heterocyclic compounds

. . containing silicon

BD21

BD22

BD23

BD24

BD25

BD27

BD28

BD29

. Macromolecular compounds

. . having oxygen-containing photosensitive groups

. . . containing epoxy groups or glycidyl groups

. . . containing carbonyl groups

. . . having oxygen-containing heterocyclic rings

. . having nitrogen-containing photosensitive groups

. . . containing nitro groups

. . . having nitrogen-containing heterocyclic rings

BD32

BD33

BD36

BD37

BD38

BD40

. . having sulfur-containing photosensitive groups

. . . having sulfur-containing heterocyclic rings

. . containing halogen atoms

. . . containing methyl halide groups

. . . containing phenyl halide groups

. . Other photosensitive groups

BD42

BD43

BD44

BD45

BD46

BD47

BD48

. . Addition polymers

. . . Acrylic polymers or methacrylic polymers

. . . Maleic acid polymers or anhydrous maleic acid polymers

. . . Diene polymers

. . . Polyvinyl alcohols

. . . Polystyrenes

. . . Silicon-containing polymers

BD52

BD53

BD54

BD55

. . Condensation polymers or polyaddition polymers

. . . Epoxy resins

. . . Silicon resins

. . . . Polysiloxanes or polysiloxanes in ladder shape

BE00
ACID FORMING OR RELEASING PHOTOSENSITIVE MATERIAL

BE01

BE02

BE04

BE05

BE07

BE08

BE10

. O-quinonediazide compounds

. . Macromolecules having o-quinonediazide groups

. Aromatic nitro compounds

. . Macromolecules having aromatic nitro groups

. Onium salts

. Organohalogen compounds

. using together the compounds which are resolved by the acid formed

BF00
PHOTO-DEGRADABLE OR RADIATION-DEGRADABLE PHOTOSENSITIVE MATERIAL

BF01

BF02

BF03

BF04

BF05

BF07

BF08

BF09

. Acrylic polymers or methacrylic polymers

. . having acrylic acid ester units or methacrylic acid ester units

. . . having methylmethacrylate units

. . having acrylonitrile units or methacrylonitrile units

. . having acrylamide units, methacrylamide units, acrylimide units or methacrylimide units

. . having halogen atoms in side chains

. . having substituted groups in the alpha-position carbon, excluding methyl groups

. . . having halogen atoms

BF11

BF12

BF13

BF14

BF15

. Vinyl polymers other than acrylic or methacrylic polymers

. . Alpha-alkenylketones

. . Polyvinylethers

. . Polymethylstyrenes

. . Polyhydroxystyrenes

BF21

BF23

BF24

BF25

BF27

BF29

BF30

. Celluloses

. Polysulfones

. . Polyolefin sulfones

. . Polystyrene sulfones

. Polycarbonates

. Others

. containing silicon

BG00
OTHER PHOTO-SOLUBLE, I.E. POSITIVE TYPE, PHOTOSENSITIVE MATERIALS

BH00
PHOTOSENSITIVE MATERIALS WHOSE PROPERTY OTHER THAN SOLUBILITY CHANGES

BH01

BH02

BH03

BH04

BH05

. decomposed and removed

. changing adhesiveness or stickiness

. changing hydrophilicity or lipophilicity

. changing chemical reactivity

. changing transmissivity or refractive index

BJ00
PHOTOSENSITIVE MATERIAL SPECIFIED BY PROPERTY OR MANUFACTURING METHOD

BJ01

BJ02

BJ03

BJ04

BJ05

BJ06

BJ07

BJ08

BJ09

BJ10

. Solubility

. . Water solubility

. . Emulsion

. Molecular weight

. . Molecular weight distribution

. Viscosity

. Elasticity

. Softening point or melting point

. Glass transition temperature

. Manufacturing methods

CA00
POLYMERISATION INITIATOR OR SENSITISER

CA01

CA02

CA03

CA04

CA05

CA06

CA07

CA09

. Carbonyl compounds

. . Acetophenones

. . Benzophenones

. . Benzoins or ethers

. . Benzylketals

. . Benzyls

. . Benzoyloximes

. . Xanthones or thioxanthones

CA11

CA13

CA14

CA15

CA17

CA18

CA19

CA20

. . Benzoquinones or anthraquinones

. Compounds other than carbonyl compounds

. . Halogen compounds, excluding onium salts

. . . Silver halides

. . Oxygen-containing compounds

. . . Peroxides

. . . Organic carboxylic acids or esters

. . . Oxygen-containing heterocyclic compounds

CA22

CA23

CA24

CA25

CA26

CA27

CA28

CA30

. . Nitrogen-containing compounds

. . . Azo compounds

. . . . Azonitrile compounds

. . . . Diazonium compounds

. . . Azide compounds

. . . Amine or amino compounds

. . . Nitrogen-containing heterocyclic compounds

. . Sulfur-containing compounds

CA31

CA32

CA34

CA35

CA37

CA39

. . . Mercaptans or disulfides

. . . Sulfur-containing heterocyclic compounds

. . Phosphorus-containing compounds

. . . Phosphines

. . Redox systems

. . Organo-metallic compounds

CA41

CA42

CA43

CA44

CA46

CA48

CA50

. . Photosensitive dyes

. . . Merocyanines or cyanine dyes

. . . Styryl dyes

. . . Leuco dyes

. . Organic silicon compounds

. . Onium salts

. . Other inorganic compounds

CB00
BINDER OR NON-PHOTOSENSITIVE MACROMOLECULE

CB01

CB02

CB03

CB04

CB06

CB07

CB08

CB09

CB10

. Natural macromolecules and modified products thereof

. . Protein and modified products thereof

. . . Gelatin and modified products thereof

. . Celluloses

. Addition polymers

. . Polyvinyl alcohols, including polyvinyl acetate

. . Polyolefins

. . . Polyvinyl chloride

. . Maleic acid polymers or maleic acid copolymers

CB11

CB12

CB13

CB14

CB15

CB16

CB17

CB19

CB20

. . Dienes

. . . Cyclised rubber

. . Polyacrylic acids or salts thereof or polymethacrylic acids or salts thereof

. . Polyacrylic acid esters or polymethacrylic acid esters

. . Polyacrylamides, polymethacrylamides, polyacrylimides or polymethacrylimides

. . Polystyrenes

. . . Polyvinylphenols

. Condensation polymers or polyaddition products

. . Polyesters

CB21

CB22

CB23

CB24

CB25

CB26

CB28

CB29

CB30

. . Polyethers

. . Polyurethanes

. . Polyamides

. . . Soluble polyamides

. . Polyimides and precursors thereof

. . Other polymers having condensed aromatic rings or precursors thereof

. . Phenol resins

. . . Novolak resins

. . Epoxy resins

CB32

CB33

CB34

. Silicon-containing resins

. . Polysiloxanes or polysiloxanes in ladder shape

. . having silicon atoms in side chains

CB41

CB42

CB43

CB45

CB47

CB48

. specified by functional groups

. . Acidic groups

. . . Carboxyl groups

. . Hydroxyl groups

. . Basic groups

. . . Quaternary ammonium salts

CB51

CB52

CB53

CB54

CB55

CB56

CB57

CB58

CB59

CB60

. specified by properties

. . Solubility

. . . Water solubility

. . . Emulsion

. . Molecular weight

. . . Molecular weight distribution

. . Viscosity

. . Elasticity

. . Melting point or softening point

. . Glass transition temperature

CC00
ADDITIVE

CC01

CC02

CC03

CC04

CC05

CC06

CC07

CC08

CC09

CC10

. Stabilisers or polymerisation inhibitors

. Ultraviolet absorbents or fog-inhibitors

. Solvents

. Surfactants

. Plasticisers

. Adhesion promoting agents

. Anti-adhesive agents

. Fillers

. Elecroconductivity imparting agents

. Charge inhibitors

CC11

CC12

CC13

CC14

CC15

CC16

CC17

CC20

. Colouring agents

. . Pigments

. . Dyes

. . changing colour or forming colour

. . . changing colour or forming colour by light exposure

. . . changing colour or forming colour by developing agents

. Hardeners, excluding those photosensitive

. Others

DA00
LAYER COMPOSITION

DA01

DA02

DA03

DA04

DA05

DA06

DA08

DA09

DA10

. Surface layers

. . Materials

. . characterised by functions

. . . Oxygen (O2) impermeable layers

. . . Anti-adhesive layers

. . . Improvement of vacuum adhesion

. Structures or shapes of photosensitive or photoresist layers

. . characterised by distribution of constituent components

. . having microcapsule structures

DA11

DA12

DA13

DA14

DA15

DA17

DA18

DA19

DA20

. . having multiple photosensitive layers

. . . Photosensitive materials in each layer being the same

. . . having two layers of different photosensitive materials

. . . . having intermediate layers

. . . . Contrast enhancing layers (CEL)

. Bases

. . Materials

. . . Materials other than metals

. . Structures or shapes

DA21

DA23

DA24

DA25

DA26

DA27

DA29

DA30

. . . Multilayered

. Planarisation layers

. . made of inorganic materials

. . made of silicon polymers

. . made of polyimide polymers

. . made of phenolic polymers

. Non-photosensitive image forming layers

. . Metal or metallised layers

DA31

DA32

DA33

DA34

DA35

DA36

DA37

DA38

DA39

DA40

. . Coloured layers

. . . Layers whose colour can be changed or dyed

. Stripping layers

. Halation inhibiting layers

. Adhesive layers

. Hydrophilic layers

. Water repellent or oil repellent layers

. Antistatic coatings

. Image receiving layers or transferred layers

. Other layers

EA00
LAYER FORMATION METHOD AND APPARATUS THEREFOR

EA01

EA03

EA04

EA05

EA06

EA07

EA08

EA10

. Pretreatment

. Layer formation

. . Coating

. . . Spin coating

. . Vapour phase deposition, plasma polymerisation, or CVD

. . Langmuir-Blodgett methods (LB)

. . Lamination

. Post-treatments, e.g. drying

FA00
IMAGE FORMING METHOD

FA01

FA03

FA04

FA05

FA06

FA07

FA08

FA09

FA10

. Pre-exposure treatments

. Exposure

. . Multiple exposures

. . . Preliminary exposure of the entire surface

. . . using multiple light source types

. . Contact exposure

. . Proximity exposure

. . Projection exposure

. . Scanning exposure

FA12

FA14

FA15

FA16

FA17

FA18

FA19

FA20

. Pre-developing treatments

. Developing

. . Liquid developing

. . . Developers being specified

. . . . Water-based developers

. . . . forming colour or changing colour by developers

. . Dry developing

. . . using plasma

FA21

FA22

FA23

FA24

FA25

FA26

FA28

FA29

FA30

. . . removed by heating

. . . forming colour or changing colour by heating

. . . Powder or toner developing

. . . Peeling development

. . . forming colour or changing colour with transfer

. . . . using microcapsules

. Post-developing treatments

. . Post-baking

. . Post-exposure

FA31

FA33

FA35

FA37

FA39

FA40

. . Treatment with hardeners

. . Correction of the formed image

. . Transfer of the formed image

. . Colouring or dyeing of the formed image

. . Other secondary processing

. . . Wet etching

FA41

FA42

FA43

FA44

FA45

FA47

FA48

FA50

. . . Dry etching

. . . Sand blasting

. . . Plating or vapour deposition

. . . . Lift-off methods

. . . Colouring or dyeing layers other than resist layers

. Removal or peeling off the used resist layers

. . Removal by release agent

. Removal or peeling off layers other than photosensitive layers

2H025	PHOTORESIST MATERIALS
	G03C3/00 ,301;G03F7/004-7/04;7/06,501;7/075-7/115;7/16-7/18