B81C	PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J 13/02; processes or apparatus specially adapted for the manufacture or treatment of piezoelectric, electrostrictive or magnetostrictive elements per se H10N 30/01)[7]
	Note(s) This subclass does not cover:[7] processes or apparatus for the manufacture or treatment of purely electrical or electronic devices, which are covered by section H, e g  group H01L 21/00;processes or apparatus involving the manipulation of single atoms or molecules, which are covered by group B82B 3/00